MaN2403 / MaD525 expired
kodama at stanford.edu
Fri May 27 11:28:38 PDT 2011
I used both old and new bottle of MaN for my process, and the results were almost same.
10KeV, 10 micron aperture, and appropriate current density is from 40-60 micron/cm2.
I encountered the poor adhesion on Si substrate as well, but I solved it by the surface cleaning
as James mentioned. But in my case, only short time etching of the native dioxide was effective.
So, wafer was put into 20:1 BOE for about 30 s, and coat MaN just after that. I suspect the poor adhesion
come from the top thin oxide layer.
kodama at stanford.edu
----- Original Message -----
From: "James W. Conway" <jwc at snf.stanford.edu>
To: tanemura at stanford.edu
Cc: "Krishna C Balram" <kcbalram at stanford.edu>, "Ebeam Lab" <raith at snf.stanford.edu>
Sent: Friday, May 27, 2011 11:01:04 AM
Subject: Re: MaN2403 / MaD525 expired
I have used the batch in the lab recently and did not have any problems
with adhesion on Silicon and Quartz without HMDS prime.
Is it possible that your substrates have some residue on them from
previous resist processes? If you were doing optical lithography or
PMMA EBL processing before on these substrates consider cleaning in
Remover PG heated to above 40 degrees C for 10 or more minutes followed
by 10 min. soak in Acetone, then Hot IPA with a perfect blow dry. I use
the ultrasonic cleaner on wbsolvent.
Some users whom employ the HMDS prime and others are reporting back to
me that it adhere better for them without the HMDS prime. Possibly
other users on this list may offer their suggestions for discussion.
I will bring in a new bottle of MaN-2403 today likely from the same
batch and we will discard the old bottle. The developer is a TMAH based
basic solution and I don't think it will degrade significantly until it
is over three years old.
Please try the new bottle on both your substrates and a clean Silicon
wafer and let me know if you are still having problems.
Upon my return from Three Beams June 6 or 7th I will test the new bottle
/ batch and if it is in any way changes from my process definition I
will promptly order a new bottle or two for us.
Thank you for the heads up!
On 5/27/2011 10:01 AM, Takuo Tanemura wrote:
> Hello James,
> We have noticed yesterday that MaN2403 in the fab has expired in Oct.
> 2010. We are facing a problem that MaN2403 does not stick to a chip
> (with thin SiO2 layer on Si) even after HMDS-primed with YES oven. We
> never had a problem about half year ago with similar process.
> Also, we noticed MaD525 has expired in Nov. 2010.
> I am wondering if you have stock on these chemicals and could replace
> them to new ones.
> Thank you,
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