From mahnaz at snf.stanford.edu Wed Oct 3 05:50:01 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Oct 3, 2001 5:50:01 PM Subject: Problem bluem 2001-10-03 17:49:59: HMDS broke a wafer Message-ID: I vaccumed the system but the adjustments are totally out. From mahnaz at snf.stanford.edu Wed Oct 3 06:06:24 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Oct 3, 2001 6:06:24 PM Subject: Problem bluem 2001-10-03 17:49:59: HMDS broke a wafer Message-ID: Reported to the wrong system.