From ethrush at sunray.snffab.stanford.edu Mon Dec 9 15:53:05 2002 From: ethrush at sunray.snffab.stanford.edu (Evan Thrush) Date: Mon, 9 Dec 2002 15:53:05 -0800 (PST) Subject: Help-bluem oven Message-ID: Hello Everyone, I am getting some strange results with the Bluem oven. About two weeks ago, there were some modification made to the oven by Mike (technician) and others. I have been doing some cures after the repairs and I am getting different results. I decided to double check the oven TC with my own portable TC and they gave consistant results. So, I am pretty sure that the oven is operating correctly now. Unfortuantely, I think that the oven was not operating correctly before and I have developed my processes with this incorrect operation, i.e. my oven cures were actually at a different temperature than the 250C cure that I wanted. Before the repairs, have you suspected that the oven temperature was not correct. I suspect the oven was actually operating at higher temperatures than the oven TC reading. Let me know if you have similar ideas because I would like to discuss this further and try to deduce what cure temperature I developed my process for. Thanks, Evan From rcrane at snf.stanford.edu Mon Dec 9 16:20:40 2002 From: rcrane at snf.stanford.edu (Dick Crane) Date: Mon, 09 Dec 2002 16:20:40 -0800 Subject: Help-bluem oven References: Message-ID: <3DF53358.F4FF8A58@snf.stanford.edu> Hi Evan, I'm having Mike contact you concerning his observations during the troubleshooting of the BlueM. The temperature programmer constants had changed to other than factory values. Mike reprogrammed them to correct values. Good luck in your troubleshooting, Dick Evan Thrush wrote: > Hello Everyone, > > I am getting some strange results with the Bluem oven. About two weeks > ago, there were some modification made to the oven by Mike (technician) > and others. I have been doing some cures after the repairs and I am > getting different results. I decided to double check the oven TC with my > own portable TC and they gave consistant results. So, I am pretty sure > that the oven is operating correctly now. Unfortuantely, I think that the > oven was not operating correctly before and I have developed my processes > with this incorrect operation, i.e. my oven cures were actually at a > different > temperature than the 250C cure that I wanted. Before the repairs, have > you suspected that the oven temperature was not correct. I suspect the > oven was actually operating at higher temperatures than the oven TC > reading. Let me know > if you have similar ideas because I would like to discuss this further and > try to deduce what cure temperature I developed my process for. > > Thanks, > Evan From mahnaz at snf.stanford.edu Mon Dec 9 16:29:05 2002 From: mahnaz at snf.stanford.edu (Mahnaz) Date: Mon, 09 Dec 2002 16:29:05 -0800 Subject: Help-bluem oven References: <3DF53358.F4FF8A58@snf.stanford.edu> Message-ID: <3DF53551.382A78E5@snf.stanford.edu> Hi Evan, Yes, the oven was running at much higher temperature than what was specified in the recipe. We can talk about it and at least come up with some answer of how much the temp. was out of wack. mahnaz Dick Crane wrote: > Hi Evan, > > I'm having Mike contact you concerning his observations during the > troubleshooting of the BlueM. The temperature programmer constants had changed > to other than factory values. Mike reprogrammed them to correct values. > > Good luck in your troubleshooting, > > Dick > > Evan Thrush wrote: > > > Hello Everyone, > > > > I am getting some strange results with the Bluem oven. About two weeks > > ago, there were some modification made to the oven by Mike (technician) > > and others. I have been doing some cures after the repairs and I am > > getting different results. I decided to double check the oven TC with my > > own portable TC and they gave consistant results. So, I am pretty sure > > that the oven is operating correctly now. Unfortuantely, I think that the > > oven was not operating correctly before and I have developed my processes > > with this incorrect operation, i.e. my oven cures were actually at a > > different > > temperature than the 250C cure that I wanted. Before the repairs, have > > you suspected that the oven temperature was not correct. I suspect the > > oven was actually operating at higher temperatures than the oven TC > > reading. Let me know > > if you have similar ideas because I would like to discuss this further and > > try to deduce what cure temperature I developed my process for. > > > > Thanks, > > Evan From ethrush at stanford.edu Mon Dec 9 17:27:19 2002 From: ethrush at stanford.edu (Evan Thrush) Date: Mon, 09 Dec 2002 17:27:19 -0800 Subject: Help2 Message-ID: <5.1.1.5.2.20021209171617.00b9aca0@snow.stanford.edu> Sorry about bombarding your inbox, but I really want to figure this out and want to add a few more questions and comments. Mahnaz and other users noticed a temperature over shoot a few weeks ago. The temperature would over shoot to about 400C and then gradually return to the setpoint of 250C or something like that. Supposedly, some user change the controller parameters and this caused this overshooting behavior. I am trying to figure out if this overshooting problem is a recent phenomena (past month) or has been happening the whole entire time I have been using the instrument (over 1 year). I doubt that this drastic overshoot problem has been occurring over the past year unnoticed. The samples I cured about six months ago worked out really well and I didn't notice any overshooting phenomena... granted I didn't check every minute. So, I suspect something more subtle has been changed over the past month. Let me know if you have any ideas and if you think that the overshoot problem has been occurring for quite some time. Thanks, Evan ------------------------------------------------------------------------------------------------------ Evan Thrush Stanford University; E.E. PhD Candidate CIS-X Rm. B113-21, Stanford, CA 94305-4075 Phone: (650)725-2774 E-mail: ethrush at stanford.edu Fax: (650)723-4659 Homepage: http://snow.stanford.edu/~ethrush From jun.f.zheng at intel.com Mon Dec 9 16:52:10 2002 From: jun.f.zheng at intel.com (Zheng, Jun F) Date: Mon, 9 Dec 2002 16:52:10 -0800 Subject: Help-bluem oven Message-ID: <621F928C3A39D61185C700508BB268435E8315@fmsmsx101.fm.intel.com> All, I run a recipe at 250C for BCB cure recently twice after the repairment. It is good results. During a test run, I also see temperature ramping up and down myself. For 250C, it was 250C +/-1 C. The real run came out with good BCB cure. Thanks, Jun-Fei -----Original Message----- From: Mahnaz [mailto:mahnaz at snf.stanford.edu] Sent: Monday, December 09, 2002 4:29 PM To: Dick Crane Cc: Evan Thrush; bluem at snf.stanford.edu; Mike Martinez Subject: Re: Help-bluem oven Hi Evan, Yes, the oven was running at much higher temperature than what was specified in the recipe. We can talk about it and at least come up with some answer of how much the temp. was out of wack. mahnaz Dick Crane wrote: > Hi Evan, > > I'm having Mike contact you concerning his observations during the > troubleshooting of the BlueM. The temperature programmer constants had changed > to other than factory values. Mike reprogrammed them to correct values. > > Good luck in your troubleshooting, > > Dick > > Evan Thrush wrote: > > > Hello Everyone, > > > > I am getting some strange results with the Bluem oven. About two weeks > > ago, there were some modification made to the oven by Mike (technician) > > and others. I have been doing some cures after the repairs and I am > > getting different results. I decided to double check the oven TC with my > > own portable TC and they gave consistant results. So, I am pretty sure > > that the oven is operating correctly now. Unfortuantely, I think that the > > oven was not operating correctly before and I have developed my processes > > with this incorrect operation, i.e. my oven cures were actually at a > > different > > temperature than the 250C cure that I wanted. Before the repairs, have > > you suspected that the oven temperature was not correct. I suspect the > > oven was actually operating at higher temperatures than the oven TC > > reading. Let me know > > if you have similar ideas because I would like to discuss this further and > > try to deduce what cure temperature I developed my process for. > > > > Thanks, > > Evan From true at snf.stanford.edu Tue Dec 10 11:52:17 2002 From: true at snf.stanford.edu (Randy True) Date: Tue, 10 Dec 2002 11:52:17 -0800 Subject: Help2 References: <5.1.1.5.2.20021209171617.00b9aca0@snow.stanford.edu> Message-ID: <3DF645F1.4A9414B4@snf.stanford.edu> Evan and Mahnaz, I haven't noticed any overshooting but I do not monitor the oven after starting it. The last time I did a bake was 10-21-02. I have been doing 250C bakes of polyimide about once a month for the last year or so. I don't think that it has been overshooting during that entire time because 1) I have loosely observed runs and not seen it and 2) my polyimide would contract considerably more if it reached a temp of 400C. Mahnaz, I would request that you monitor this and POST the results, even if just once a month. We had a similar problem with the hotplates 6-9 months ago. These problems are BIG deals and I'm sure the users would appreciate a more organized approach. Mahnaz, can you please describe what user parameters were changed, how to check these parameteres, and what the proper values are? --Randy Evan Thrush wrote: > Sorry about bombarding your inbox, but I really want to figure this out and > want to add a few more questions and comments. > > Mahnaz and other users noticed a temperature over shoot a few weeks > ago. The temperature would over shoot to about 400C and then gradually > return to the setpoint of 250C or something like that. Supposedly, some > user change the controller parameters and this caused this overshooting > behavior. I am trying to figure out if this overshooting problem is a > recent phenomena (past month) or has been happening the whole entire time I > have been using the instrument (over 1 year). I doubt that this drastic > overshoot problem has been occurring over the past year unnoticed. The > samples I cured about six months ago worked out really well and I didn't > notice any overshooting phenomena... granted I didn't check every > minute. So, I suspect something more subtle has been changed over the past > month. Let me know if you have any ideas and if you think that the > overshoot problem has been occurring for quite some time. > > Thanks, > Evan > > ------------------------------------------------------------------------------------------------------ > > Evan Thrush > Stanford University; E.E. PhD Candidate > CIS-X Rm. B113-21, Stanford, CA 94305-4075 > Phone: (650)725-2774 E-mail: ethrush at stanford.edu > Fax: (650)723-4659 Homepage: http://snow.stanford.edu/~ethrush From ethrush at sunray.snffab.stanford.edu Tue Dec 17 13:08:49 2002 From: ethrush at sunray.snffab.stanford.edu (Evan Thrush) Date: Tue, 17 Dec 2002 13:08:49 -0800 (PST) Subject: oven mystery Message-ID: Hello Everyone, As I stated before, I have been getting very different results in curing posistive photoresist than I was getting six months ago. My process invovles the curing of positive photoresist, which is fairly simple. I can't think of any other factors that may have affected the film properties other than temperature. Anyway, I have been doing many cures over the past two weeks and I conclude that the oven temperature was at least running 50C hotter than the TC reading. It wouldn't surprize me if it was running 100C hotter!! The oven appears to be operating correctly now, but, beware, because you will mostly likely see different results as compared to six months ago. Let me know if you agree or disagree. Evan