Problem cascade SNF 2008-02-12 22:31:19: The chuck was cold.

kimsangb at snf.stanford.edu kimsangb at snf.stanford.edu
Tue Feb 12 22:31:19 PST 2008


It looks like the chuck is getting colder and colder even though temptronic is off. As a result, Wafer vapors condensed on my sample.




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