From eenriquez at snf.stanford.edu  Thu Aug  2 15:17:55 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 2 Aug 2012 15:17:55 -0700
Subject: Comment ccp-dep SNF 2012-08-02 15:17:54: Chiller has been installed
Message-ID: <mailman.16.1356281214.3488.ccp-dep-pcs@snf.stanford.edu>

Will test chiller tomorrow.



From eenriquez at snf.stanford.edu  Fri Aug  3 14:02:53 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 3 Aug 2012 14:02:53 -0700
Subject: Shutdown ccp-dep SNF 2012-07-05 13:12:34: putting into shutdown due to chiller isues
Message-ID: <mailman.17.1356281214.3488.ccp-dep-pcs@snf.stanford.edu>

Installed repaired chiller.  temperature now at 70 C.



From eenriquez at snf.stanford.edu  Fri Aug  3 14:02:59 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 3 Aug 2012 14:02:59 -0700
Subject: Comment ccp-dep SNF 2012-07-18 12:51:57: chiller update
Message-ID: <mailman.18.1356281214.3488.ccp-dep-pcs@snf.stanford.edu>

Installed repaired chiller.  temperature now at 70 C.



From eenriquez at snf.stanford.edu  Fri Aug  3 14:03:15 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 3 Aug 2012 14:03:15 -0700
Subject: Comment ccp-dep SNF 2012-07-23 14:41:24: Update chiller
Message-ID: <mailman.19.1356281214.3488.ccp-dep-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Fri Aug  3 14:03:20 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 3 Aug 2012 14:03:20 -0700
Subject: Comment ccp-dep SNF 2012-07-26 14:13:25: Update chiller
Message-ID: <mailman.20.1356281214.3488.ccp-dep-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Fri Aug  3 14:03:24 2012
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 3 Aug 2012 14:03:24 -0700
Subject: Comment ccp-dep SNF 2012-08-02 15:17:54: Chiller has been installed
Message-ID: <mailman.21.1356281214.3488.ccp-dep-pcs@snf.stanford.edu>

Archived



From clee58 at snf.stanford.edu  Fri Aug  3 15:02:15 2012
From: clee58 at snf.stanford.edu (clee58 at snf.stanford.edu)
Date: Fri, 3 Aug 2012 15:02:15 -0700
Subject: Problem ccp-dep SNF 2012-08-03 15:02:14: Alarm: Stanby temperature out of compliance
Message-ID: <mailman.22.1356281214.3488.ccp-dep-pcs@snf.stanford.edu>

I've got the "stanby temperature out of compliance" alarms twice during the deposition step. 
I just ended steps and it is now in stanby mode. 



From latta at snf.stanford.edu  Fri Aug  3 16:01:16 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 3 Aug 2012 16:01:16 -0700
Subject: Problem ccp-dep SNF 2012-08-03 15:02:14: Alarm: Stanby temperature out of compliance
Message-ID: <mailman.23.1356281214.3488.ccp-dep-pcs@snf.stanford.edu>

The substrate temp is not reaching 350C.  When I cam in it was at 333 and never got much higher.  I reset the standby temp to 300C and ran a clean & coat cycle.



From latta at snf.stanford.edu  Fri Aug  3 16:02:03 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 3 Aug 2012 16:02:03 -0700
Subject: Problem ccp-dep SNF 2012-08-03 16:02:03: No 350C processing
Message-ID: <mailman.24.1356281214.3488.ccp-dep-pcs@snf.stanford.edu>

The wafer temp can't reach 350C  (!?)
300C is ok.