From mcvittie at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-08-06 10:26:45: Mis-Load: Heater contacting wafers Message-ID: <4042085.16.1344274005911.JavaMail.coral@shine> After wafer carrier loads, heater is suppose to move up and contact back of wafers. An Alarm says that this is not happening. Will open chamber to see what is going on. Jim From cbaxter at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Comment ccp-dep SNF 2012-08-06 14:38:34: Update Message-ID: <28870041.21.1344289115376.JavaMail.coral@shine> Still working on the heater problem and also having issue with the proessure controller. From cbaxter at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Comment ccp-dep SNF 2012-08-07 08:57:13: Update Message-ID: <3485018.47.1344355034737.JavaMail.coral@shine> We have another problem, the load lock D16 pump is seized removed the pump and were sending it out for repair.. From cbaxter at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Comment ccp-dep SNF 2012-08-07 08:57:13: Update Message-ID: <20249306.51.1344360012989.JavaMail.coral@shine> Changed D16 load lock pump and tested.... From mcvittie at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-08-06 10:26:45: Mis-Load: Heater contacting wafers Message-ID: <16788767.54.1344371792371.JavaMail.coral@shine> The problem was a bad crimp on one of the connectors going to the top pedestal sensor. Jim From mcvittie at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-08-07 13:37:15: Load lock pump bad Message-ID: <9302864.55.1344371836820.JavaMail.coral@shine> The LL pump failed. Jim From mdickey at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Comment ccp-dep SNF 2012-08-09 06:06:48: pump Message-ID: <27305468.81.1344517609745.JavaMail.coral@shine> The load lock pump has been replaced From mcvittie at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-08-07 13:37:15: Load lock pump bad Message-ID: <3078015.110.1344553871951.JavaMail.coral@shine> Pump was replaced. Still have not determined the cause for the pump failure From mcvittie at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Comment ccp-dep SNF 2012-08-09 06:06:48: pump Message-ID: <685620.111.1344553892140.JavaMail.coral@shine> From mcvittie at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Comment ccp-dep SNF 2012-08-06 14:38:34: Update Message-ID: <20435742.112.1344553901227.JavaMail.coral@shine> From mcvittie at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-08-09 16:14:52: CCp-dep -- Pedestal Not up Problem Message-ID: <12216222.113.1344554093059.JavaMail.coral@shine> The problem as seen earlier in week. After wafer carrier is loaded the pedestal drops at the same time the slot valve to the LL is closed. While the pedestal up sensor indeed has an intermittant problem, it does appear to be the cause. From mcvittie at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-08-09 16:14:52: CCp-dep -- Pedestal Not up Problem Message-ID: <14062072.114.1344554339391.JavaMail.coral@shine> Went back to an earlier version of the sysmon software and found that the problem went away. The problem appears to be with the RCHAMBER.ini file. Went back to the version of this file from June 2010. Updated the old file with Pressure and MFC parameters from the latest version of file. The problem seems to be gone for now. Jim From mtang at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-08-09 20:26:00: TGO sensor problem Message-ID: <8406299.116.1344569161195.JavaMail.coral@shine> CL-96 module problem. No hydrides to be used until this is repaired. From maurice at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-08-09 20:26:00: TGO sensor problem Message-ID: <21927718.20.1344892988514.JavaMail.coral@shine> After swapping out parts and changing our version of software, Calcon has the CL96 communicating with the rest of the TGO system. From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-08-03 16:02:03: No 350C processing Message-ID: <1179675.38.1344968272623.JavaMail.coral@shine> Jim Mcvittie reset the heater controller. From mtang at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-08-15 08:30:09: Temp control at 350 Message-ID: <33528244.49.1345044610083.JavaMail.coral@shine> Processes at 300 are fine. Processes at 350 may fault for temp stability. Jim McV has recipe fixes to address this. Standard recipes have been modified. If you are using a custom recipe at 350, contact Jim about modifying to fix. Also, the heat exchanger is at its limist for flow and temp. Maintenance will schedule time down to relocate the heat exchanger from the basement to behind the system to reduce its load. From chen0622 at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-08-15 11:14:28: could not pump down the locklock Message-ID: <16051457.53.1345054468502.JavaMail.coral@shine> The pump option is not available (selectible) on Utility/Loadlock after placing the wafers into the loadlock. The loadlock is currently in atomosphere since I could not get it pumped down. From mcvittie at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-08-15 12:44:04: CCP-Dep: LL Pump Won't go below 0.9T Message-ID: <6245995.54.1345059845426.JavaMail.coral@shine> Capped off LL pump and let it pump on itself. After 10 min pressure is only down to 0.9T. Jim From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-08-15 11:14:28: could not pump down the locklock Message-ID: <23438815.138.1345239238651.JavaMail.coral@shine> Reset the chiller fault which prevented any other operations. From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-08-15 12:44:04: CCP-Dep: LL Pump Won't go below 0.9T Message-ID: <21841057.139.1345239598361.JavaMail.coral@shine> The pump is OK. The pump's inlet trap was installed on the exhaust side. Cleaned the trap, refilled with fresh zeolite. From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-08-17 14:43:23: Chiller test Message-ID: <8974452.140.1345239804352.JavaMail.coral@shine> Installed the chiller behind the system to check if the temperature response improves From mcvittie at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-08-20 11:37:26: LL Pump Still not pumping to base Message-ID: <348269.37.1345487846740.JavaMail.coral@shine> LL Pump still has pump problem. Please replace pump. Jim From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-08-20 11:37:26: LL Pump Still not pumping to base Message-ID: <14588292.14.1345574153089.JavaMail.coral@shine> Replaced the pump From mcvittie at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-08-22 17:38:21: Ran out of Ar/5%SiH4 Message-ID: <21022241.68.1345682301566.JavaMail.coral@shine> Test run faulted out because lack of SiH4. Jim From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-08-22 17:38:21: Ran out of Ar/5%SiH4 Message-ID: <19193136.70.1345685092509.JavaMail.coral@shine> Opened the final valve in the gas cylinder cabinet From jparker at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-08-24 07:45:53: Temperature alarm Message-ID: <10573177.109.1345819553758.JavaMail.coral@shine> "Temp channel 1/2 is off" is the error displayed and there's a loud alarm going off. From cbaxter at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Comment ccp-dep SNF 2012-08-24 09:54:51: Chiller Message-ID: <9372774.120.1345827291551.JavaMail.coral@shine> The heat exchanger has no flow... From cbaxter at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Comment ccp-dep SNF 2012-08-24 09:54:51: Chiller Message-ID: <1142518.128.1345829964480.JavaMail.coral@shine> Heat exchanger is back up and running... From cbaxter at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-08-24 07:45:53: Temperature alarm Message-ID: <4522920.129.1345829995638.JavaMail.coral@shine> Temp is back up to temp.. From mcvittie at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-08-17 14:43:23: Chiller test Message-ID: <822741.139.1345833382270.JavaMail.coral@shine> Heat Exchanger is working ok. jim From mcvittie at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-08-15 08:30:09: Temp control at 350 Message-ID: <21198428.140.1345833685615.JavaMail.coral@shine> The temp limit for tool is 350. A 350C set point usually results in a temp of 346 +/- 2C. For best results you want the heat exchanger (top electrode) set to 70C. You want to keep the wafer carrier in the chambrer and transfer it to the LL just before you want to load your wafers. When you finish with the tool, return thecarrier to the chamber. Jim From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Comment ccp-dep SNF 2012-08-24 16:51:43: From Jim McV Message-ID: <26395630.169.1345852303987.JavaMail.coral@shine> The temp limit for tool is 350. A 350C set point usually results in a temp of 346 ? 2C. For best results you want the heat exchanger (top electrode) set to 70C. You want to keep the wafer carrier in the chambrer and transfer it to the LL just before you want to load your wafers. When you finish with the tool, return thecarrier to the chamber. Jim From kcbalram at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-09-04 16:30:27: Chamber 1 slot valve will not open Message-ID: <17087723.27.1346801428268.JavaMail.coral@shine> Got an error message while loading the system Wafers are in the loadlock Krishna From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-09-04 16:30:27: Chamber 1 slot valve will not open Message-ID: <30387719.38.1346872034868.JavaMail.coral@shine> Recovered the user's wafer piece. Found the chamber door close solenoid was not exhausting the pneumatic air when the open solenoid activated. Relieved the pressure on the close solenoid and it started to work normally. Cycled the pallette five times with no problems From kcbalram at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-09-06 18:23:20: Temperature error during process Message-ID: <2242217.63.1346981001146.JavaMail.coral@shine> I was running the sio300-1 dep process During my second run, I got an error saying heat exchanger temperature compliance not reached. It was set to 65 I hit hold and the process continued OK after that Best, Krishna From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-09-06 18:23:20: Temperature error during process Message-ID: <24187911.70.1347031557743.JavaMail.coral@shine> No problem found. The chiller temperature responds to the changes in setpoint. From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Comment ccp-dep SNF 2012-09-12 11:41:58: Update operating instructions Message-ID: <9625944.109.1347475318816.JavaMail.coral@shine> Still a work in progress.... From mmrincon at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-09-18 09:57:00: temporary shutdown Message-ID: <5403403.17.1347987420898.JavaMail.coral@shine> to clear nh3 lines for fiji 1 upgrade. will be up before 4 pm From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-09-18 09:57:00: temporary shutdown Message-ID: <12874383.25.1348003645806.JavaMail.coral@shine> Completed ammonia cylinder work. From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-09-26 11:44:53: Small water leak at front of tool Message-ID: <14806807.41.1348685093346.JavaMail.coral@shine> I put down an absorbent pad. From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-09-26 11:44:53: Small water leak at front of tool Message-ID: <27423891.62.1348758092193.JavaMail.coral@shine> Wafer from previous chiller leak. From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-09-27 15:53:16: Can't unload wafers from chamber Message-ID: <30722748.79.1348786396564.JavaMail.coral@shine> Error message is; Atmosphere status not prest because chamber and loadlock not vented, not at atmosphere. Wafers are just dummies. From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-09-27 15:53:16: Can't unload wafers from chamber Message-ID: <1491444.89.1348843635682.JavaMail.coral@shine> Pumped down the system and pressed the Unload button. From jrshakya at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: jrshakya at snf.stanford.edu (jrshakya at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-09-30 00:17:55: System in unknown state Message-ID: <4478373.107.1348989476029.JavaMail.coral@shine> I found the system in unknown state. The LL can't be pumped down any more. From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-09-30 00:17:55: System in unknown state Message-ID: <4530791.8.1349110883993.JavaMail.coral@shine> Cleaned chiller alarm, unloaded the chamber and placed in Standby. From waqasm at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: waqasm at snf.stanford.edu (waqasm at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-10-02 13:16:30: trasfer valve doesnt open Message-ID: <28657054.11.1349208991210.JavaMail.coral@shine> cannot transfer wafers into the chamber the valve doesnt open From mcvittie at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-10-02 14:51:17: Slot Valve Not Opening For transfer Message-ID: <13514993.14.1349214678757.JavaMail.coral@shine> The digital output for the valve to open is ok, but the digital input for the slot valve is not going to the open position. I do not if the valve is actually opening or not. Jim From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-10-02 14:51:17: Slot Valve Not Opening For transfer Message-ID: <18060764.23.1349275236740.JavaMail.coral@shine> Adjusted the slot valve pneumatic exaust. Cycled the pallete several times with no problems. From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-10-02 13:16:30: trasfer valve doesnt open Message-ID: <1997895.24.1349275241799.JavaMail.coral@shine> Adjusted the slot valve pneumatic exaust. Cycled the pallete several times with no problems. From chen0622 at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-10-03 10:41:42: slot valve could not be opened Message-ID: <8100393.11.1349286102417.JavaMail.coral@shine> the slot valve still could not be opened to load wafers. The loadlock could not be vent because of the error. The loadlock is still under vacuum with my 4 wafers. From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-10-03 10:41:42: slot valve could not be opened Message-ID: <18430186.13.1349304206787.JavaMail.coral@shine> Adjusted slot valve pneumatic solenoid exhaust. From maurice at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-10-09 02:06:46: TGO system in fault Message-ID: <32478372.18.1349773606326.JavaMail.coral@shine> From shott at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-10-09 02:06:46: TGO system in fault Message-ID: <16939205.10.1349791074844.JavaMail.coral@shine> TGO CL-96 system is back in operation. John From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Comment ccp-dep SNF 2012-10-09 15:01:09: CH4 is not available Message-ID: <5602395.29.1349820070032.JavaMail.coral@shine> From pnataraj at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-10-11 15:50:01: load tray wont vent Message-ID: <30072684.101.1349995801935.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-10-11 15:50:01: load tray wont vent Message-ID: <5491926.108.1350055036062.JavaMail.coral@shine> Pressed the "Hold" button (to un-hold the process) and vented the load lock. From ylyang at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: ylyang at snf.stanford.edu (ylyang at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-10-15 22:32:11: heat exch temperature keep on dropping Message-ID: <2082228.31.1350365532424.JavaMail.coral@shine> I got the alarm due to the temperature out of range. I hit the end step and found the temperature of heat exch continue dropping. Now it is 49C. My wafers are still in the champer. Please put them in the box. I leave a note on the table From ylyang at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: ylyang at snf.stanford.edu (ylyang at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-10-15 22:59:31: heat exch temperature out of range Message-ID: <220530.32.1350367171429.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-10-15 22:32:11: heat exch temperature keep on dropping Message-ID: <5118120.38.1350402965468.JavaMail.coral@shine> Reset the chiller and unloaded the user's wafers. From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-10-15 22:59:31: heat exch temperature out of range Message-ID: <23414654.39.1350402970527.JavaMail.coral@shine> Reset the chiller and unloaded the user's wafers. From ylyang at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: ylyang at snf.stanford.edu (ylyang at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-10-19 15:37:51: gas channel 4 (He) out of compliance Message-ID: <6196993.67.1350686272351.JavaMail.coral@shine> I was doing SiN deposition and got the alarm saying "gas channel 4 out of compliance' From cbaxter at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-10-19 15:37:51: gas channel 4 (He) out of compliance Message-ID: <1190354.68.1350686685418.JavaMail.coral@shine> Flowed He at manual mode w/out problem.. From ylyang at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: ylyang at snf.stanford.edu (ylyang at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-10-19 15:49:22: Gas channel 4 out of compliance Message-ID: <22919998.69.1350686962442.JavaMail.coral@shine> still can not reach the setpoint. He flow is only 15 sccm From mcvittie at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-10-19 15:49:22: Gas channel 4 out of compliance Message-ID: <30475472.73.1350693164869.JavaMail.coral@shine> Someone using Drytek4 turned off the He valve behind the tool. This He valve controls the He going to the CCp, HDP, STS2 and the new PT deep Si tool. There is a big sign next to this valve saying do not close. Jim and Ceaser From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-10-26 12:03:48: hisssing sound during load/unload Message-ID: <117585.119.1351278228478.JavaMail.coral@shine> Solenoid, perhaps? (I am running a clean and coat- done ~1:15) From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Comment ccp-dep SNF 2012-10-09 15:01:09: CH4 is not available Message-ID: <32999924.120.1351280779826.JavaMail.coral@shine> CH4 is now available From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-10-26 12:03:48: hisssing sound during load/unload Message-ID: <8861145.144.1351285573199.JavaMail.coral@shine> This is normal pneumatic exhaust sound. From edfei at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: edfei at snf.stanford.edu (edfei at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-10-29 17:20:14: load lock will not pump Message-ID: <13219687.32.1351556415553.JavaMail.coral@shine> /machine is asking the user to close the load lock door, even though the door is already closed From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-10-29 17:20:14: load lock will not pump Message-ID: <13346520.61.1351623195393.JavaMail.coral@shine> No problem found. From ludwig at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-11-09 12:12:56: Pressure fluctuations in the chamber Message-ID: <14375391.15.1352491977042.JavaMail.coral@shine> From mcvittie at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-11-09 16:23:34: Pedestal Up sensor Does seem to work Message-ID: <5803712.32.1352507015713.JavaMail.coral@shine> Can not load or unload the carrier. Get pedestal not up error although the pedestal is up. Seems to be a up se nsor problem. Jim From mcvittie at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-11-09 12:12:56: Pressure fluctuations in the chamber Message-ID: <27312786.33.1352507053782.JavaMail.coral@shine> Could not reproduce problem. Jim From cbaxter at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-11-09 16:23:34: Pedestal Up sensor Does seem to work Message-ID: <17882617.46.1352602361961.JavaMail.coral@shine> The pedestal pin up position sensor is bad, verified this by swapping the pin up and pin down position sensor signal and checked signal at the adio page. Changed pin up proximity position sensor. From apal at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: apal at snf.stanford.edu (apal at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-10 20:22:12: Process Pressure Message-ID: <7040875.48.1352607733412.JavaMail.coral@shine> Cannot reach to process pressure 1000mtorr - stuck ar ~489mtorr From cbaxter at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-10 20:22:12: Process Pressure Message-ID: <6427357.1.1352646642794.JavaMail.coral@shine> Was able to pressure at 1000mt at manual mode w/out problem. From waqasm at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: waqasm at snf.stanford.edu (waqasm at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-11 13:46:55: pressure complaince (thermal soak) Message-ID: <19517371.8.1352670415962.JavaMail.coral@shine> For thermal soak the pressure fails to reach 1000mtorr (stops around 500mtorr). He flow is as required (1000ccm). Unable to proceed From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-11-12 10:23:41: Throttle valve not controlling Message-ID: <104920.0.1352744622839.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-11-12 10:23:41: Throttle valve not controlling Message-ID: <25634653.0.1352761016360.JavaMail.coral@shine> Corrected throttle valve setup. Ran a couple of recipes with no problems. From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-11 13:46:55: pressure complaince (thermal soak) Message-ID: <24065561.1.1352761026400.JavaMail.coral@shine> Corrected throttle valve setup. Ran a couple of recipes with no problems. From kcbalram at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-13 15:39:54: Pressure error Message-ID: <10206935.21.1352849994653.JavaMail.coral@shine> Error while running SiC 300-1... pressure unable to stabilize..... Same error as Ludwig reported two days ago Krishna From cbaxter at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Comment ccp-dep SNF 2012-11-13 16:04:11: Pressure fault Message-ID: <26819581.22.1352851451655.JavaMail.coral@shine> When I reset the throttle valve and i can control the pressure, but after a 5 to 10 sec the pressure dopped off, need further trouble shooting.. From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-13 15:39:54: Pressure error Message-ID: <682184.44.1352916600281.JavaMail.coral@shine> User's recipe requires CF4. CF4 will not be available until tomorrow. Ran a SiN recipe and a plasma clean with no problems. From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Comment ccp-dep SNF 2012-11-13 16:04:11: Pressure fault Message-ID: <30070137.45.1352916635431.JavaMail.coral@shine> Archived From mdickey at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-14 11:10:20: CF4 Message-ID: <4990114.46.1352920220690.JavaMail.coral@shine> Out of CF4, replacement bottle expected thursday at the latest From ludwig at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-14 16:55:57: Nitride ununiformity @350C Message-ID: <10268632.67.1352940958165.JavaMail.coral@shine> Ran 4 wafers and two runs, one was for coating the chamber the results compared to last week, (used the same dep. time) was (using woollam 9-point measurement): -last week: Average: 600A, Max 650A, refractive index: 2.05 -this week (date 11/14/12) Average: 722A , Max 981A, Min. 660A, refractive index: 1.99 From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-14 17:04:19: Uniformity bad Message-ID: <1885759.68.1352941459283.JavaMail.coral@shine> Ran thick layers of SiO350-1 and SiN350-1. Sorry I don't have numbers, but to the eye the layers are nonuniform at both the flat and opposite edge. Othre users reported higher dep rates and nonuniformity for thin layers. This was SiN350-1, too. From chen0622 at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-15 07:42:12: SIN-350 , uniformity no good Message-ID: <13323727.76.1352994133079.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-11-15 08:07:44: Bad dep unifromity Message-ID: <21020224.77.1352995665134.JavaMail.coral@shine> From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-16 16:23:27: Uniformity issues Message-ID: <20921469.132.1353111807189.JavaMail.coral@shine> Non-uniformity of the thin films have been reported. We have spent a couple of days trying to track down the problem. As of right now, with a new cleaning recipe the uniformity has improved a bit. It is not at the 1-2% spec'ed. However, we are realeasing the tool for use over the weekend for those processes which do not require good uniformity. We will continue to work on improving uniformity. We recommend that users of the tool run the new clean recipe before committing device wafers to the deposition. The recipe is named CLEAN-1T. Assume that it is etching at a rate of 800A/min for multi-layers. As always, record your run data in the logbook. Team Ccp-dep From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-11-15 08:07:44: Bad dep unifromity Message-ID: <27711461.133.1353111871559.JavaMail.coral@shine> Released to users not requiring uniform thin films. Work will continue on solving the problem. From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Comment ccp-dep SNF 2012-11-20 12:06:10: 5% uniformity across the wafer Message-ID: <29729595.6.1353441971081.JavaMail.coral@shine> Used SiN350-1 for 15 mins. From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-15 07:42:12: SIN-350 , uniformity no good Message-ID: <30147631.14.1353523388201.JavaMail.coral@shine> working on it. Have improved the uniformity to 5% across a wafer, but need to improve that. From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Comment ccp-dep SNF 2012-08-24 16:51:43: From Jim McV Message-ID: <21080952.15.1353523487172.JavaMail.coral@shine> heat exchanger now set to 350/65C From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Comment ccp-dep SNF 2012-09-12 11:41:58: Update operating instructions Message-ID: <2482280.16.1353523526572.JavaMail.coral@shine> newer instructions posted on wiki and put at ccp work station. From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-14 16:55:57: Nitride ununiformity @350C Message-ID: <12279117.17.1353523571001.JavaMail.coral@shine> Still working on it. Updates forthcoming From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-14 17:04:19: Uniformity bad Message-ID: <161592.18.1353523592219.JavaMail.coral@shine> archived From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-16 16:23:27: Uniformity issues Message-ID: <25568801.17.1353549109123.JavaMail.coral@shine> Uniformity holding at about 5%, we are, however, going to suggest that users to clean frequently using the CLEAN300-1 or CLEAN350-1 recipes. From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-21 17:53:30: Uniformity holding at about 5% Message-ID: <1542054.18.1353549211094.JavaMail.coral@shine> We are, however, going to suggest that users to clean frequently using the CLEAN300-1 or CLEAN350-1 recipes. Work on the uniformity issue is on-going.... From waqasm at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: waqasm at snf.stanford.edu (waqasm at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-23 12:41:26: Pressure compliance Message-ID: <17613371.10.1353703287621.JavaMail.coral@shine> Pressure compliance issue cropped up again. Unable to reach 1000mtorr during step 2. From jrshakya at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: jrshakya at snf.stanford.edu (jrshakya at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-23 21:35:21: Can't reach base pressure Message-ID: <19345541.17.1353735322165.JavaMail.coral@shine> The system couldn't reach base pressure during thermla soak. Alarm went off and run aborted. From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-14 11:10:20: CF4 Message-ID: <20167389.7.1353944333687.JavaMail.coral@shine> Installed new CF4 cylinder From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-11-26 08:54:27: Pressure control problem Message-ID: <10624007.10.1353948868365.JavaMail.coral@shine> System is not able to control the pressure. From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-11-27 15:33:23: Transfer arm not in home position Message-ID: <19374604.11.1354059204377.JavaMail.coral@shine> This is the error msg I got when unloading the platen. I wasn't able to do any deposition..... From cbaxter at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-11-27 15:33:23: Transfer arm not in home position Message-ID: <17129293.18.1354067025458.JavaMail.coral@shine> JimM and I recovered the transfer arn, was able to homed arm on manual mode. Excerise arm on auto mode 5x w/out problem. From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-11-26 08:54:27: Pressure control problem Message-ID: <14808362.19.1354067833142.JavaMail.coral@shine> Elmer removed and unstuck the throttle valve. Holding pressure fine now. Test run ran, looks good (~5%), releasing the tool with aSi restriction. The plan is to have users deposit film in chamber, do a clean and coat and re-run qual (SiN350-1, 15 mins) From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-23 21:35:21: Can't reach base pressure Message-ID: <5535828.20.1354067844260.JavaMail.coral@shine> ok now From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-23 12:41:26: Pressure compliance Message-ID: <30321009.21.1354067853338.JavaMail.coral@shine> ok now From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-21 17:53:30: Uniformity holding at about 5% Message-ID: <19054722.22.1354067878586.JavaMail.coral@shine> new restrictions posted From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-27 18:05:03: Tool relaesed- NO aSi Depositions Message-ID: <13631753.23.1354068303627.JavaMail.coral@shine> Folks, A test run after the following repairs- wet clean, inspection, showerhead cleaned, deposition removed from screws, throttle valve removed and unstuck. Results from test run, SiN350-1, 15 mins; Avr thickness = 2040A Min = 1991A Max = 2116A Std Dev = 37.1 Dep rate = 136A/min The results are close to the 5% uniformity we were getting before the throttle valve stopped control the pressure. The plan is to release the tool for SiO and SiN films only and to run a clean & coat followed by a test run tomorrow. From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-11-28 10:56:46: Shutdown for calibration Message-ID: <13102293.11.1354129007203.JavaMail.coral@shine> The tool is going to be cooled down, gases calibrated, platen checked for flatness. The aim is to have to tool back in operation on Fri. From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-27 18:05:03: Tool relaesed- NO aSi Depositions Message-ID: <4413067.37.1354217110987.JavaMail.coral@shine> new tests in progress From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-11-28 10:56:46: Shutdown for calibration Message-ID: <23404576.14.1354317884844.JavaMail.coral@shine> Hey, it's Fri and I am releasing the tool! From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Comment ccp-dep SNF 2012-11-20 12:06:10: 5% uniformity across the wafer Message-ID: <1444702.15.1354317916156.JavaMail.coral@shine> Newer results posted From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-30 15:31:53: Not a problem, really.... Message-ID: <26551240.16.1354318313968.JavaMail.coral@shine> I'm trying to get Users attention; After changing chamber pressures, looking into cleans, wet cleaning, cleaning the showerhead, calibrating gases, running test after test we have finally found that the alignment of the wafer transfer platen has the greatest effect on the uniformity across a wafer. Here are some results; After alignment; Avr = 916 Max = 950 Min = 887 IR = 1.994-1.997 Dep rate = 153A/min Uf = 3.4% After alignment and Clean & Coat (1st run after clean); Avr = 895 Max = 933 Min = 858 IR = 2.015 (every measurement) Dep rate = 149A/min Uf = 4.2% I will continue to look into the seasoning of the chamber and post results. From ntayebi at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Comment ccp-dep SNF 2012-12-03 05:41:01: the fringing patterns are back Message-ID: <29981758.4.1354542062184.JavaMail.coral@shine> From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Comment ccp-dep SNF 2012-12-03 05:41:01: the fringing patterns are back Message-ID: <21045217.37.1354586049608.JavaMail.coral@shine> The fringing problem is due to the wafer transfer platen not being in the correct position. From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-12-03 17:59:36: Wafer transfer platen not going to correct position Message-ID: <26579196.38.1354586377792.JavaMail.coral@shine> It seems that as the platen moves in and out of the chamber it becomes slightly misaligned. This will start to give uniformity problems that may become worse. At this point staff can reseat the platen. One of the things users of the tool will observe is plasma underneath the platen when looking inot the viewing port. We will be looking/reseating the platen at least once a day for the near term. From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-12-03 17:59:36: Wafer transfer platen not going to correct position Message-ID: <2347640.1.1355256968184.JavaMail.coral@shine> Plans for full alignment tomorrw. Posistioning has been good for about 2 wks.... From latta at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-11-30 15:31:53: Not a problem, really.... Message-ID: <709763.2.1355257029774.JavaMail.coral@shine> archived From jrshakya at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: jrshakya at snf.stanford.edu (jrshakya at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-12-11 22:27:17: 2 System alarms on Message-ID: <15416452.8.1355293637637.JavaMail.coral@shine> Temp channel 3/4 off. Utilities 2 (water) off. From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-12-11 22:27:17: 2 System alarms on Message-ID: <4301103.0.1355352983683.JavaMail.coral@shine> System had a water glitch. Reset the chiller and heater. From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Comment ccp-dep SNF 2012-12-12 15:00:11: Wet cleaned the chamber Message-ID: <19707269.1.1355353212236.JavaMail.coral@shine> Found a black spot (about the size of a wafer) on the gas distribution plate when I opened the chamber to check the palette alignment. It looks like somebody ran a wafer with resist. From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-12-13 07:43:15: Annual PM Message-ID: <5474195.16.1355413396262.JavaMail.coral@shine> Field service is performing the annual PM, repairing the Fast switch and replacing the chuck. From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-12-13 07:43:15: Annual PM Message-ID: <33273041.17.1355413519333.JavaMail.coral@shine> Ha ha. Sorry wrong machine From ludwig at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-12-14 12:21:04: loading mech. is not working well Message-ID: <28620445.26.1355516464301.JavaMail.coral@shine> tried 3 times, still loads uneven the Nit. dep. was too high compared to yeasterday over 100A more for a 600A dep. From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-12-14 12:21:04: loading mech. is not working well Message-ID: <23597535.31.1355528804991.JavaMail.coral@shine> no problem found From jrshakya at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: jrshakya at snf.stanford.edu (jrshakya at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-12-16 15:15:29: System is in weird state Message-ID: <5985294.11.1355699730504.JavaMail.coral@shine> Hi I found system left in weird state. It was in STANDBY but RUN was also highlighted. No attempt to anort or cancel the step work. It doesn't allow running another since it think it is still running something. -Joe From popomoo at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-12-16 16:08:15: jrshakya is right... Message-ID: <22210468.13.1355702896118.JavaMail.coral@shine> it does not work at all.... From jrshakya at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: jrshakya at snf.stanford.edu (jrshakya at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-12-16 16:23:30: Shutting down since no recipe can be run Message-ID: <29833103.16.1355703811615.JavaMail.coral@shine> System is in weird state, where it thinks it is running something. Doesn't allow to run another recipe. From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Shutdown ccp-dep SNF 2012-12-16 16:23:30: Shutting down since no recipe can be run Message-ID: <9392978.28.1355772002992.JavaMail.coral@shine> Restarted the software From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-12-16 16:08:15: jrshakya is right... Message-ID: <19020562.29.1355772021049.JavaMail.coral@shine> Restarted the software and ran the process qual From eenriquez at snf.stanford.edu Sun Dec 23 08:46:54 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:46:54 -0000 Subject: Problem ccp-dep SNF 2012-12-16 15:15:29: System is in weird state Message-ID: <3353343.30.1355772034127.JavaMail.coral@shine> Restarted the software