December 2012 Archives by thread

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Starting: Sun Dec 23 08:46:54 PST 2012
Ending: Sun Dec 23 08:46:54 PST 2012
Messages: 132

Problem ccp-dep SNF 2012-11-11 13:46:55: pressure complaince (thermal soak) waqasm at snf.stanford.edu
- Problem ccp-dep SNF 2012-11-11 13:46:55: pressure complaince (thermal soak) eenriquez at snf.stanford.edu
Shutdown ccp-dep SNF 2012-11-12 10:23:41: Throttle valve not controlling eenriquez at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-11-12 10:23:41: Throttle valve not controlling eenriquez at snf.stanford.edu
Problem ccp-dep SNF 2012-11-13 15:39:54: Pressure error kcbalram at snf.stanford.edu
- Problem ccp-dep SNF 2012-11-13 15:39:54: Pressure error eenriquez at snf.stanford.edu
Comment ccp-dep SNF 2012-11-13 16:04:11: Pressure fault cbaxter at snf.stanford.edu
- Comment ccp-dep SNF 2012-11-13 16:04:11: Pressure fault eenriquez at snf.stanford.edu
Problem ccp-dep SNF 2012-11-14 11:10:20: CF4 mdickey at snf.stanford.edu
- Problem ccp-dep SNF 2012-11-14 11:10:20: CF4 eenriquez at snf.stanford.edu
Problem ccp-dep SNF 2012-11-14 16:55:57: Nitride ununiformity @350C ludwig at snf.stanford.edu
- Problem ccp-dep SNF 2012-11-14 16:55:57: Nitride ununiformity @350C latta at snf.stanford.edu
Problem ccp-dep SNF 2012-11-14 17:04:19: Uniformity bad latta at snf.stanford.edu
- Problem ccp-dep SNF 2012-11-14 17:04:19: Uniformity bad latta at snf.stanford.edu
Problem ccp-dep SNF 2012-11-15 07:42:12: SIN-350 , uniformity no good chen0622 at snf.stanford.edu
- Problem ccp-dep SNF 2012-11-15 07:42:12: SIN-350 , uniformity no good latta at snf.stanford.edu
Shutdown ccp-dep SNF 2012-11-15 08:07:44: Bad dep unifromity eenriquez at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-11-15 08:07:44: Bad dep unifromity latta at snf.stanford.edu
Problem ccp-dep SNF 2012-11-16 16:23:27: Uniformity issues latta at snf.stanford.edu
- Problem ccp-dep SNF 2012-11-16 16:23:27: Uniformity issues latta at snf.stanford.edu
Comment ccp-dep SNF 2012-11-20 12:06:10: 5% uniformity across the wafer latta at snf.stanford.edu
- Comment ccp-dep SNF 2012-11-20 12:06:10: 5% uniformity across the wafer latta at snf.stanford.edu
Problem ccp-dep SNF 2012-11-21 17:53:30: Uniformity holding at about 5% latta at snf.stanford.edu
- Problem ccp-dep SNF 2012-11-21 17:53:30: Uniformity holding at about 5% latta at snf.stanford.edu
Problem ccp-dep SNF 2012-11-23 12:41:26: Pressure compliance waqasm at snf.stanford.edu
- Problem ccp-dep SNF 2012-11-23 12:41:26: Pressure compliance latta at snf.stanford.edu
Problem ccp-dep SNF 2012-11-23 21:35:21: Can't reach base pressure jrshakya at snf.stanford.edu
- Problem ccp-dep SNF 2012-11-23 21:35:21: Can't reach base pressure latta at snf.stanford.edu
Shutdown ccp-dep SNF 2012-11-26 08:54:27: Pressure control problem eenriquez at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-11-26 08:54:27: Pressure control problem latta at snf.stanford.edu
Shutdown ccp-dep SNF 2012-11-27 15:33:23: Transfer arm not in home position latta at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-11-27 15:33:23: Transfer arm not in home position cbaxter at snf.stanford.edu
Problem ccp-dep SNF 2012-11-27 18:05:03: Tool relaesed- NO aSi Depositions latta at snf.stanford.edu
- Problem ccp-dep SNF 2012-11-27 18:05:03: Tool relaesed- NO aSi Depositions latta at snf.stanford.edu
Shutdown ccp-dep SNF 2012-11-28 10:56:46: Shutdown for calibration latta at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-11-28 10:56:46: Shutdown for calibration latta at snf.stanford.edu
Problem ccp-dep SNF 2012-11-30 15:31:53: Not a problem, really.... latta at snf.stanford.edu
- Problem ccp-dep SNF 2012-11-30 15:31:53: Not a problem, really.... latta at snf.stanford.edu
Comment ccp-dep SNF 2012-12-03 05:41:01: the fringing patterns are back ntayebi at snf.stanford.edu
- Comment ccp-dep SNF 2012-12-03 05:41:01: the fringing patterns are back latta at snf.stanford.edu
Problem ccp-dep SNF 2012-12-03 17:59:36: Wafer transfer platen not going to correct position latta at snf.stanford.edu
- Problem ccp-dep SNF 2012-12-03 17:59:36: Wafer transfer platen not going to correct position latta at snf.stanford.edu
Problem ccp-dep SNF 2012-12-11 22:27:17: 2 System alarms on jrshakya at snf.stanford.edu
- Problem ccp-dep SNF 2012-12-11 22:27:17: 2 System alarms on eenriquez at snf.stanford.edu
Comment ccp-dep SNF 2012-12-12 15:00:11: Wet cleaned the chamber eenriquez at snf.stanford.edu
Shutdown ccp-dep SNF 2012-12-13 07:43:15: Annual PM eenriquez at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-12-13 07:43:15: Annual PM eenriquez at snf.stanford.edu
Problem ccp-dep SNF 2012-12-14 12:21:04: loading mech. is not working well ludwig at snf.stanford.edu
- Problem ccp-dep SNF 2012-12-14 12:21:04: loading mech. is not working well eenriquez at snf.stanford.edu
Problem ccp-dep SNF 2012-12-16 15:15:29: System is in weird state jrshakya at snf.stanford.edu
- Problem ccp-dep SNF 2012-12-16 15:15:29: System is in weird state eenriquez at snf.stanford.edu
Problem ccp-dep SNF 2012-12-16 16:08:15: jrshakya is right... popomoo at snf.stanford.edu
- Problem ccp-dep SNF 2012-12-16 16:08:15: jrshakya is right... eenriquez at snf.stanford.edu
Shutdown ccp-dep SNF 2012-12-16 16:23:30: Shutting down since no recipe can be run jrshakya at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-12-16 16:23:30: Shutting down since no recipe can be run eenriquez at snf.stanford.edu
Shutdown ccp-dep SNF 2012-08-06 10:26:45: Mis-Load: Heater contacting wafers mcvittie at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-08-06 10:26:45: Mis-Load: Heater contacting wafers mcvittie at snf.stanford.edu
Comment ccp-dep SNF 2012-08-06 14:38:34: Update cbaxter at snf.stanford.edu
- Comment ccp-dep SNF 2012-08-06 14:38:34: Update mcvittie at snf.stanford.edu
Comment ccp-dep SNF 2012-08-07 08:57:13: Update cbaxter at snf.stanford.edu
- Comment ccp-dep SNF 2012-08-07 08:57:13: Update cbaxter at snf.stanford.edu
Shutdown ccp-dep SNF 2012-08-07 13:37:15: Load lock pump bad mcvittie at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-08-07 13:37:15: Load lock pump bad mcvittie at snf.stanford.edu
Comment ccp-dep SNF 2012-08-09 06:06:48: pump mdickey at snf.stanford.edu
- Comment ccp-dep SNF 2012-08-09 06:06:48: pump mcvittie at snf.stanford.edu
Shutdown ccp-dep SNF 2012-08-09 16:14:52: CCp-dep -- Pedestal Not up Problem mcvittie at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-08-09 16:14:52: CCp-dep -- Pedestal Not up Problem mcvittie at snf.stanford.edu
Shutdown ccp-dep SNF 2012-08-09 20:26:00: TGO sensor problem mtang at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-08-09 20:26:00: TGO sensor problem maurice at snf.stanford.edu
Problem ccp-dep SNF 2012-08-03 16:02:03: No 350C processing eenriquez at snf.stanford.edu
Problem ccp-dep SNF 2012-08-15 08:30:09: Temp control at 350 mtang at snf.stanford.edu
- Problem ccp-dep SNF 2012-08-15 08:30:09: Temp control at 350 mcvittie at snf.stanford.edu
Problem ccp-dep SNF 2012-08-15 11:14:28: could not pump down the locklock chen0622 at snf.stanford.edu
- Problem ccp-dep SNF 2012-08-15 11:14:28: could not pump down the locklock eenriquez at snf.stanford.edu
Shutdown ccp-dep SNF 2012-08-15 12:44:04: CCP-Dep: LL Pump Won't go below 0.9T mcvittie at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-08-15 12:44:04: CCP-Dep: LL Pump Won't go below 0.9T eenriquez at snf.stanford.edu
Shutdown ccp-dep SNF 2012-08-17 14:43:23: Chiller test eenriquez at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-08-17 14:43:23: Chiller test mcvittie at snf.stanford.edu
Shutdown ccp-dep SNF 2012-08-20 11:37:26: LL Pump Still not pumping to base mcvittie at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-08-20 11:37:26: LL Pump Still not pumping to base eenriquez at snf.stanford.edu
Shutdown ccp-dep SNF 2012-08-22 17:38:21: Ran out of Ar/5%SiH4 mcvittie at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-08-22 17:38:21: Ran out of Ar/5%SiH4 eenriquez at snf.stanford.edu
Problem ccp-dep SNF 2012-08-24 07:45:53: Temperature alarm jparker at snf.stanford.edu
- Problem ccp-dep SNF 2012-08-24 07:45:53: Temperature alarm cbaxter at snf.stanford.edu
Comment ccp-dep SNF 2012-08-24 09:54:51: Chiller cbaxter at snf.stanford.edu
- Comment ccp-dep SNF 2012-08-24 09:54:51: Chiller cbaxter at snf.stanford.edu
Comment ccp-dep SNF 2012-08-24 16:51:43: From Jim McV latta at snf.stanford.edu
- Comment ccp-dep SNF 2012-08-24 16:51:43: From Jim McV latta at snf.stanford.edu
Shutdown ccp-dep SNF 2012-09-04 16:30:27: Chamber 1 slot valve will not open kcbalram at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-09-04 16:30:27: Chamber 1 slot valve will not open eenriquez at snf.stanford.edu
Problem ccp-dep SNF 2012-09-06 18:23:20: Temperature error during process kcbalram at snf.stanford.edu
- Problem ccp-dep SNF 2012-09-06 18:23:20: Temperature error during process eenriquez at snf.stanford.edu
Comment ccp-dep SNF 2012-09-12 11:41:58: Update operating instructions latta at snf.stanford.edu
- Comment ccp-dep SNF 2012-09-12 11:41:58: Update operating instructions latta at snf.stanford.edu
Shutdown ccp-dep SNF 2012-09-18 09:57:00: temporary shutdown mmrincon at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-09-18 09:57:00: temporary shutdown eenriquez at snf.stanford.edu
Problem ccp-dep SNF 2012-09-26 11:44:53: Small water leak at front of tool latta at snf.stanford.edu
- Problem ccp-dep SNF 2012-09-26 11:44:53: Small water leak at front of tool eenriquez at snf.stanford.edu
Shutdown ccp-dep SNF 2012-09-27 15:53:16: Can't unload wafers from chamber latta at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-09-27 15:53:16: Can't unload wafers from chamber eenriquez at snf.stanford.edu
Problem ccp-dep SNF 2012-09-30 00:17:55: System in unknown state jrshakya at snf.stanford.edu
- Problem ccp-dep SNF 2012-09-30 00:17:55: System in unknown state eenriquez at snf.stanford.edu
Problem ccp-dep SNF 2012-10-02 13:16:30: trasfer valve doesnt open waqasm at snf.stanford.edu
- Problem ccp-dep SNF 2012-10-02 13:16:30: trasfer valve doesnt open eenriquez at snf.stanford.edu
Shutdown ccp-dep SNF 2012-10-02 14:51:17: Slot Valve Not Opening For transfer mcvittie at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-10-02 14:51:17: Slot Valve Not Opening For transfer eenriquez at snf.stanford.edu
Shutdown ccp-dep SNF 2012-10-03 10:41:42: slot valve could not be opened chen0622 at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-10-03 10:41:42: slot valve could not be opened eenriquez at snf.stanford.edu
Shutdown ccp-dep SNF 2012-10-09 02:06:46: TGO system in fault maurice at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-10-09 02:06:46: TGO system in fault shott at snf.stanford.edu
Comment ccp-dep SNF 2012-10-09 15:01:09: CH4 is not available eenriquez at snf.stanford.edu
- Comment ccp-dep SNF 2012-10-09 15:01:09: CH4 is not available eenriquez at snf.stanford.edu
Problem ccp-dep SNF 2012-10-11 15:50:01: load tray wont vent pnataraj at snf.stanford.edu
- Problem ccp-dep SNF 2012-10-11 15:50:01: load tray wont vent eenriquez at snf.stanford.edu
Problem ccp-dep SNF 2012-10-15 22:32:11: heat exch temperature keep on dropping ylyang at snf.stanford.edu
- Problem ccp-dep SNF 2012-10-15 22:32:11: heat exch temperature keep on dropping eenriquez at snf.stanford.edu
Shutdown ccp-dep SNF 2012-10-15 22:59:31: heat exch temperature out of range ylyang at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-10-15 22:59:31: heat exch temperature out of range eenriquez at snf.stanford.edu
Problem ccp-dep SNF 2012-10-19 15:37:51: gas channel 4 (He) out of compliance ylyang at snf.stanford.edu
- Problem ccp-dep SNF 2012-10-19 15:37:51: gas channel 4 (He) out of compliance cbaxter at snf.stanford.edu
Problem ccp-dep SNF 2012-10-19 15:49:22: Gas channel 4 out of compliance ylyang at snf.stanford.edu
- Problem ccp-dep SNF 2012-10-19 15:49:22: Gas channel 4 out of compliance mcvittie at snf.stanford.edu
Problem ccp-dep SNF 2012-10-26 12:03:48: hisssing sound during load/unload latta at snf.stanford.edu
- Problem ccp-dep SNF 2012-10-26 12:03:48: hisssing sound during load/unload eenriquez at snf.stanford.edu
Problem ccp-dep SNF 2012-10-29 17:20:14: load lock will not pump edfei at snf.stanford.edu
- Problem ccp-dep SNF 2012-10-29 17:20:14: load lock will not pump eenriquez at snf.stanford.edu
Shutdown ccp-dep SNF 2012-11-09 12:12:56: Pressure fluctuations in the chamber ludwig at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-11-09 12:12:56: Pressure fluctuations in the chamber mcvittie at snf.stanford.edu
Shutdown ccp-dep SNF 2012-11-09 16:23:34: Pedestal Up sensor Does seem to work mcvittie at snf.stanford.edu
- Shutdown ccp-dep SNF 2012-11-09 16:23:34: Pedestal Up sensor Does seem to work cbaxter at snf.stanford.edu
Problem ccp-dep SNF 2012-11-10 20:22:12: Process Pressure apal at snf.stanford.edu
- Problem ccp-dep SNF 2012-11-10 20:22:12: Process Pressure cbaxter at snf.stanford.edu

Last message date: Sun Dec 23 08:46:54 PST 2012
Archived on: Sun Dec 23 08:46:55 PST 2012

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