From elmere at stanford.edu  Tue Feb 12 09:13:16 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Tue, 12 Feb 2013 09:13:16 -0800 (PST)
Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-02-12 09:13:15: Process
 cooling flow problem
Message-ID: <27035453.32.1360689196518.JavaMail.coral@snc-coraldb.stanford.edu>

Problem with facilities. No water flow at the tool.

From elmere at stanford.edu  Tue Feb 12 11:12:52 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Tue, 12 Feb 2013 11:12:52 -0800 (PST)
Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-02-12 09:13:15: Process
 cooling flow problem
Message-ID: <5322916.42.1360696372771.JavaMail.coral@snc-coraldb.stanford.edu>

Water flow and CDA has been restored. Completed chamber clean.

From pnataraj at snf.stanford.edu  Wed Feb 13 20:33:39 2013
From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu)
Date: Wed, 13 Feb 2013 20:33:39 -0800 (PST)
Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-02-13 20:33:39: Heat
	Exchanger Issuses
Message-ID: <20867435.76.1360816419662.JavaMail.coral@snc-coraldb.stanford.edu>


From elmere at stanford.edu  Thu Feb 14 11:31:20 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Thu, 14 Feb 2013 11:31:20 -0800 (PST)
Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-02-13 20:33:39: Heat
 Exchanger Issuses
Message-ID: <6700732.86.1360870280526.JavaMail.coral@snc-coraldb.stanford.edu>

Reset the heat exchanger.  The heat exchanger had an over temperature fault. Please do not run the heat exchanger temperature >65 C.

From rehanna at stanford.edu  Thu Feb 14 19:48:10 2013
From: rehanna at stanford.edu (rehanna at stanford.edu)
Date: Thu, 14 Feb 2013 19:48:10 -0800 (PST)
Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-02-14 19:48:10: Machine is
	non-responsive
Message-ID: <17029160.103.1360900090548.JavaMail.coral@snc-coraldb.stanford.edu>

The machine stopped responding to comands and the temperature started dropping very fast, so I tried to close the program hoping it was just a program mal-function. When I did, the whole computer shut down, and I could not restart it. Dr. Provine advised me to shut the machine down on badger and inform the staff.
My wafer is still inside the equipment.

From mtang at stanford.edu  Sat Feb 16 14:31:04 2013
From: mtang at stanford.edu (mtang at stanford.edu)
Date: Sat, 16 Feb 2013 14:31:04 -0800 (PST)
Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-02-14 19:48:10: Machine
 is non-responsive
Message-ID: <17842385.138.1361053864453.JavaMail.coral@snc-coraldb.stanford.edu>

Pradeep fixed this.  See his comment.

From pnataraj at snf.stanford.edu  Sat Feb 16 15:52:38 2013
From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu)
Date: Sat, 16 Feb 2013 15:52:38 -0800 (PST)
Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-02-16 15:52:38: problems
Message-ID: <152295.139.1361058758145.JavaMail.coral@snc-coraldb.stanford.edu>

I fixed first problem..now it has problems with moving arm

From elmere at stanford.edu  Tue Feb 19 14:56:39 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Tue, 19 Feb 2013 14:56:39 -0800 (PST)
Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-02-16 15:52:38: problems
Message-ID: <17913604.175.1361314599392.JavaMail.coral@snc-coraldb.stanford.edu>

Palette sensor problem.  The arm tried to load the palette when the palette was already in the process chamber. The palette lifted after the arm went inside the chamber.  Straigntened out the arm, re-centered the palette plasment, performed a wet clean and a plasma clean.
Process qual is good. Ran the SiN350-1 recipe.  Dep rate 137 A/min. %non uniformity= 1.9%

From audet at stanford.edu  Tue Feb 19 21:45:53 2013
From: audet at stanford.edu (audet at stanford.edu)
Date: Tue, 19 Feb 2013 21:45:53 -0800 (PST)
Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-02-19 21:45:53: heat
	exchanger problems
Message-ID: <734863.7.1361339153970.JavaMail.coral@snc-coraldb.stanford.edu>

Temperature compliance error during processing.  Managed to get my wafers out, but now gives "Temperature channel 1/2 is off"error. Cannot get the system into standby mode.

From elmere at stanford.edu  Wed Feb 20 11:52:55 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Wed, 20 Feb 2013 11:52:55 -0800 (PST)
Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-02-19 21:45:53: heat
 exchanger problems
Message-ID: <8414572.29.1361389975261.JavaMail.coral@snc-coraldb.stanford.edu>

Lowered the coolant delivery pressure.  Monitored system for 4 hours with no problems.

From audet at stanford.edu  Thu Feb 21 04:08:55 2013
From: audet at stanford.edu (audet at stanford.edu)
Date: Thu, 21 Feb 2013 04:08:55 -0800 (PST)
Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-02-21 04:08:54: software
	crash
Message-ID: <16179550.1.1361448535244.JavaMail.coral@snc-coraldb.stanford.edu>

software crashed when loading aSi recipe.

From elmere at stanford.edu  Thu Feb 21 10:01:40 2013
From: elmere at stanford.edu (elmere at stanford.edu)
Date: Thu, 21 Feb 2013 10:01:40 -0800 (PST)
Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-02-21 04:08:54:
	software crash
Message-ID: <20289731.18.1361469700063.JavaMail.coral@snc-coraldb.stanford.edu>

Restarted Windows. Ran a plasma clean.

From kodama at stanford.edu  Fri Feb 22 01:45:06 2013
From: kodama at stanford.edu (kodama at stanford.edu)
Date: Fri, 22 Feb 2013 01:45:06 -0800 (PST)
Subject: [ccp-dep-pcs] Problem ccp-dep SNF 2013-02-22 01:45:05: ready mode
 temp out of compliance error
Message-ID: <10502506.32.1361526306053.JavaMail.coral@snc-coraldb.stanford.edu>

The error was appeared and I could not advance the process step. The recipe was SiO350-1. Because it could not be returned to "stand-by" mode, my one Si wafer is still in the chamber with 3 dummy wafer. If anyone can recover the status, please extract my wafer and put it in my note. Thanks,

From audet at stanford.edu  Fri Feb 22 08:21:13 2013
From: audet at stanford.edu (audet at stanford.edu)
Date: Fri, 22 Feb 2013 08:21:13 -0800 (PST)
Subject: [ccp-dep-pcs] Problem ccp-dep SNF 2013-02-22 08:21:13: system not
	usable
Message-ID: <6021457.36.1361550073889.JavaMail.coral@snc-coraldb.stanford.edu>

Previous user ran a recipe with heat exchanger setting of 70C?  It looks like this caused the heat exchanger unit to shut off.
Can't set standby temp or get system into standby mode to resolve.

From audet at stanford.edu  Fri Feb 22 09:03:49 2013
From: audet at stanford.edu (audet at stanford.edu)
Date: Fri, 22 Feb 2013 09:03:49 -0800 (PST)
Subject: [ccp-dep-pcs] Comment ccp-dep SNF 2013-02-22 09:03:48: set heat
 exchanger temp to 60C
Message-ID: <14688701.38.1361552629934.JavaMail.coral@snc-coraldb.stanford.edu>

Make sure the heat exchanger temp is set to 60C for any recipe that you run.  System will fail at higher temperature settings.

From nlatta at stanford.edu  Fri Feb 22 15:35:46 2013
From: nlatta at stanford.edu (nlatta at stanford.edu)
Date: Fri, 22 Feb 2013 15:35:46 -0800 (PST)
Subject: [ccp-dep-pcs] Problem ccp-dep SNF 2013-02-22 08:21:13: system
	not usable
Message-ID: <12790365.59.1361576146564.JavaMail.coral@snc-coraldb.stanford.edu>

All recipes set to 60C

From nlatta at stanford.edu  Fri Feb 22 15:36:26 2013
From: nlatta at stanford.edu (nlatta at stanford.edu)
Date: Fri, 22 Feb 2013 15:36:26 -0800 (PST)
Subject: [ccp-dep-pcs] Comment ccp-dep SNF 2012-12-12 15:00:11: Wet
 cleaned the chamber
Message-ID: <22631269.60.1361576186655.JavaMail.coral@snc-coraldb.stanford.edu>

archived

From nlatta at stanford.edu  Fri Feb 22 15:36:42 2013
From: nlatta at stanford.edu (nlatta at stanford.edu)
Date: Fri, 22 Feb 2013 15:36:42 -0800 (PST)
Subject: [ccp-dep-pcs] Comment ccp-dep SNF 2013-01-22 14:37:54: Update
	silane
Message-ID: <32480862.61.1361576202700.JavaMail.coral@snc-coraldb.stanford.edu>

archived

From nlatta at stanford.edu  Fri Feb 22 15:37:12 2013
From: nlatta at stanford.edu (nlatta at stanford.edu)
Date: Fri, 22 Feb 2013 15:37:12 -0800 (PST)
Subject: [ccp-dep-pcs] Comment ccp-dep SNF 2013-01-23 09:50:18: Cleaned
	the chamber
Message-ID: <10037526.62.1361576232774.JavaMail.coral@snc-coraldb.stanford.edu>

archived

From nlatta at stanford.edu  Fri Feb 22 15:38:39 2013
From: nlatta at stanford.edu (nlatta at stanford.edu)
Date: Fri, 22 Feb 2013 15:38:39 -0800 (PST)
Subject: [ccp-dep-pcs] Problem ccp-dep SNF 2013-02-22 01:45:05: ready
 mode temp out of compliance error
Message-ID: <29910153.63.1361576319957.JavaMail.coral@snc-coraldb.stanford.edu>

Spoke with user- this is because to heat exchanger was not set to 60C.  Iwent through all the recipes and set them to 60C.

From nlatta at stanford.edu  Fri Feb 22 15:42:35 2013
From: nlatta at stanford.edu (nlatta at stanford.edu)
Date: Fri, 22 Feb 2013 15:42:35 -0800 (PST)
Subject: [ccp-dep-pcs] Comment ccp-dep SNF 2013-02-22 15:42:35: Set all
 ecipes to 60C (heat exchanger)
Message-ID: <24925533.64.1361576555439.JavaMail.coral@snc-coraldb.stanford.edu>

Addressing the 'temp out of compliance' error issue we have set all the recipes to 60C for the heat exchanger.  Please check your recipes before starting the process.  The temps are set in the Initial Step of a recipe.

From dsukhdeo at stanford.edu  Fri Feb 22 18:36:29 2013
From: dsukhdeo at stanford.edu (dsukhdeo at stanford.edu)
Date: Fri, 22 Feb 2013 18:36:29 -0800 (PST)
Subject: [ccp-dep-pcs] Problem ccp-dep SNF 2013-02-22 18:36:29: CCP software
	crash
Message-ID: <28578336.67.1361586989986.JavaMail.coral@snc-coraldb.stanford.edu>

The CCP "sysmon" program crashed while I was loading my recipe. An error box appeared saying it crashed and needed to close, but it seems to have partially frozen. Maybe just restarting sysmon.exe would fix everything, but I don't want to risk breaking anything without a technician's approval.
-Dave Sukhdeo
347-301-2724
PS If this is in fact easily fixable, I have no wafers loaded in or anything for the next user to worry about. At present, the loading chamber is vented to atmosphere but I have not yet opened it.

From dsukhdeo at stanford.edu  Fri Feb 22 19:05:39 2013
From: dsukhdeo at stanford.edu (dsukhdeo at stanford.edu)
Date: Fri, 22 Feb 2013 19:05:39 -0800 (PST)
Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-02-22 19:05:38: CCP won't
	pump down
Message-ID: <33160896.68.1361588739435.JavaMail.coral@snc-coraldb.stanford.edu>

Since the CCP won't pump down it doesn't seem usable until this gets fixed.
The software crashed a few minutes ago, and after restarting the software (sysmon.exe) the tool refuses to pump down. I've confirmed this with two other users (Wooshik Jung, Ashish Pal) who also tried to resolve this problem with me.
-Dave Sukhdeo
347-301-2724

From mcvittie at stanford.edu  Fri Feb 22 21:25:33 2013
From: mcvittie at stanford.edu (mcvittie at stanford.edu)
Date: Fri, 22 Feb 2013 21:25:33 -0800 (PST)
Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-02-22 19:05:38: CCP
	won't pump down
Message-ID: <32118811.70.1361597133959.JavaMail.coral@snc-coraldb.stanford.edu>

Re-booted computer. Did load and unload with no problems.  Jim 

From mcvittie at stanford.edu  Fri Feb 22 21:26:37 2013
From: mcvittie at stanford.edu (mcvittie at stanford.edu)
Date: Fri, 22 Feb 2013 21:26:37 -0800 (PST)
Subject: [ccp-dep-pcs] Problem ccp-dep SNF 2013-02-22 18:36:29: CCP
	software crash
Message-ID: <26207649.71.1361597197098.JavaMail.coral@snc-coraldb.stanford.edu>

Re-booted computer. It appears to work fine now. Will keep eye on it.   
Jim