From jrshakya at stanford.edu Thu Jan 17 20:20:30 2013 From: jrshakya at stanford.edu (jrshakya at stanford.edu) Date: Thu, 17 Jan 2013 20:20:30 -0800 (PST) Subject: [ccp-dep-pcs] Problem ccp-dep SNF 2013-01-17 20:20:29: Again in weird state Message-ID: <11919482.11.1358482830090.JavaMail.coral@snc-coraldb.stanford.edu> The system went into Run + Standby state when it was not able to reach base temperature. From kcbalram at stanford.edu Fri Jan 18 18:37:23 2013 From: kcbalram at stanford.edu (kcbalram at stanford.edu) Date: Fri, 18 Jan 2013 18:37:23 -0800 (PST) Subject: [ccp-dep-pcs] Problem ccp-dep SNF 2013-01-18 18:37:22: System is in wierd state Message-ID: <27804206.31.1358563043293.JavaMail.coral@snc-coraldb.stanford.edu> Can't move the platen in. service -> maintenance -> wafer handling button is not active Krishna From kcbalram at stanford.edu Fri Jan 18 18:42:42 2013 From: kcbalram at stanford.edu (kcbalram at stanford.edu) Date: Fri, 18 Jan 2013 18:42:42 -0800 (PST) Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-01-18 18:42:42: System not usable Message-ID: <26601221.32.1358563362933.JavaMail.coral@snc-coraldb.stanford.edu> From elmere at stanford.edu Tue Jan 22 10:53:43 2013 From: elmere at stanford.edu (elmere at stanford.edu) Date: Tue, 22 Jan 2013 10:53:43 -0800 (PST) Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-01-18 18:42:42: System not usable Message-ID: <17677367.57.1358880823703.JavaMail.coral@snc-coraldb.stanford.edu> Chiller level sensor was not functional. Cleaned the sensor. Ran plasma cleand and conditioned the chamber. From elmere at stanford.edu Tue Jan 22 10:53:51 2013 From: elmere at stanford.edu (elmere at stanford.edu) Date: Tue, 22 Jan 2013 10:53:51 -0800 (PST) Subject: [ccp-dep-pcs] Problem ccp-dep SNF 2013-01-17 20:20:29: Again in weird state Message-ID: <1871241.58.1358880831732.JavaMail.coral@snc-coraldb.stanford.edu> Chiller level sensor was not functional. Cleaned the sensor. Ran plasma cleand and conditioned the chamber. From elmere at stanford.edu Tue Jan 22 10:53:56 2013 From: elmere at stanford.edu (elmere at stanford.edu) Date: Tue, 22 Jan 2013 10:53:56 -0800 (PST) Subject: [ccp-dep-pcs] Problem ccp-dep SNF 2013-01-18 18:37:22: System is in wierd state Message-ID: <20111140.59.1358880836755.JavaMail.coral@snc-coraldb.stanford.edu> Chiller level sensor was not functional. Cleaned the sensor. Ran plasma cleand and conditioned the chamber. From elmere at stanford.edu Tue Jan 22 10:54:03 2013 From: elmere at stanford.edu (elmere at stanford.edu) Date: Tue, 22 Jan 2013 10:54:03 -0800 (PST) Subject: [ccp-dep-pcs] Comment ccp-dep SNF 2013-01-20 20:20:29: Update Message-ID: <30441362.60.1358880843781.JavaMail.coral@snc-coraldb.stanford.edu> Chiller level sensor was not functional. Cleaned the sensor. Ran plasma cleand and conditioned the chamber. From audet at stanford.edu Tue Jan 22 11:57:23 2013 From: audet at stanford.edu (audet at stanford.edu) Date: Tue, 22 Jan 2013 11:57:23 -0800 (PST) Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-01-22 11:57:23: gas channel 1 out of compliance Message-ID: <17582053.61.1358884643330.JavaMail.coral@snc-coraldb.stanford.edu> cannot deposit From elmere at stanford.edu Tue Jan 22 14:35:34 2013 From: elmere at stanford.edu (elmere at stanford.edu) Date: Tue, 22 Jan 2013 14:35:34 -0800 (PST) Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-01-22 11:57:23: gas channel 1 out of compliance Message-ID: <26485050.68.1358894134115.JavaMail.coral@snc-coraldb.stanford.edu> Replaced silane cylinder From elmere at stanford.edu Tue Jan 22 14:37:55 2013 From: elmere at stanford.edu (elmere at stanford.edu) Date: Tue, 22 Jan 2013 14:37:55 -0800 (PST) Subject: [ccp-dep-pcs] Comment ccp-dep SNF 2013-01-22 14:37:54: Update silane Message-ID: <4182066.69.1358894275403.JavaMail.coral@snc-coraldb.stanford.edu> Replace silane cylinder. Returned user's dummy wafers back to his wafer box. Ran sio-350 test using staff dummy wafers. From elmere at stanford.edu Wed Jan 23 09:50:19 2013 From: elmere at stanford.edu (elmere at stanford.edu) Date: Wed, 23 Jan 2013 09:50:19 -0800 (PST) Subject: [ccp-dep-pcs] Comment ccp-dep SNF 2013-01-23 09:50:18: Cleaned the chamber Message-ID: <12128655.92.1358963419335.JavaMail.coral@snc-coraldb.stanford.edu> From audet at stanford.edu Thu Jan 24 17:48:46 2013 From: audet at stanford.edu (audet at stanford.edu) Date: Thu, 24 Jan 2013 17:48:46 -0800 (PST) Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-01-24 17:48:46: CH4 flow problem Message-ID: <28835600.41.1359078526585.JavaMail.coral@snc-coraldb.stanford.edu> SiC recipe failed. Error "Gas channel 2 out of compliance". Chip and carrier wafer are sitting inside process chamber. Please unload into chip holder and wafer box, respectively. From elmere at stanford.edu Fri Jan 25 08:36:27 2013 From: elmere at stanford.edu (elmere at stanford.edu) Date: Fri, 25 Jan 2013 08:36:27 -0800 (PST) Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-01-24 17:48:46: CH4 flow problem Message-ID: <31387530.45.1359131787321.JavaMail.coral@snc-coraldb.stanford.edu> The final valve in the gas cabinet tripped. Reset the valve. Unloaded the user's sample. Ran the user's recipe with no problems. From audet at stanford.edu Sat Jan 26 15:39:51 2013 From: audet at stanford.edu (audet at stanford.edu) Date: Sat, 26 Jan 2013 15:39:51 -0800 (PST) Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-01-26 15:39:51: software crash Message-ID: <19134904.21.1359243591940.JavaMail.coral@snc-coraldb.stanford.edu> software crashed when trying to start clean350 recipe. From mtang at stanford.edu Sun Jan 27 21:28:51 2013 From: mtang at stanford.edu (mtang at stanford.edu) Date: Sun, 27 Jan 2013 21:28:51 -0800 (PST) Subject: [ccp-dep-pcs] Shutdown ccp-dep SNF 2013-01-26 15:39:51: software crash Message-ID: <22064254.25.1359350931280.JavaMail.coral@snc-coraldb.stanford.edu> Cesar rebooted and system appears operational. Please proceed with caution and report observations. From mtang at stanford.edu Sun Jan 27 21:29:06 2013 From: mtang at stanford.edu (mtang at stanford.edu) Date: Sun, 27 Jan 2013 21:29:06 -0800 (PST) Subject: [ccp-dep-pcs] Problem ccp-dep SNF 2013-01-27 21:29:06: Rebooted Message-ID: <2199864.26.1359350946325.JavaMail.coral@snc-coraldb.stanford.edu> Cesar rebooted and system appears operational. Please proceed with caution and report observations. From elmere at stanford.edu Mon Jan 28 09:09:06 2013 From: elmere at stanford.edu (elmere at stanford.edu) Date: Mon, 28 Jan 2013 09:09:06 -0800 (PST) Subject: [ccp-dep-pcs] Problem ccp-dep SNF 2013-01-27 21:29:06: Rebooted Message-ID: <9325127.30.1359392946035.JavaMail.coral@snc-coraldb.stanford.edu> Ran plasma clean with no problems.