[ccp-dep-pcs] Shutdown ccp-dep SNF 2013-01-24 17:48:46: CH4 flow problem

audet at stanford.edu audet at stanford.edu
Thu Jan 24 17:48:46 PST 2013


SiC recipe failed.  Error "Gas channel 2 out of compliance".  Chip and carrier wafer are sitting inside process chamber.  Please unload into chip holder and wafer box, respectively.


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