[ccp-dep-pcs] Comment ccp-dep SNF 2014-06-13 13:11:26: Tape flakes inside airlock

agupta66 at gmail.com agupta66 at gmail.com
Fri Jun 13 13:11:27 PDT 2014


Found tape flakes inside airlock.  
Also, sometimes find particles on the backside of the wafer that need N2 gun to blow off.


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