From pradeep.nataraj at gmail.com Wed Mar 6 16:26:06 2013 From: pradeep.nataraj at gmail.com (Pradeep Nataraj) Date: Wed, 6 Mar 2013 16:26:06 -0800 Subject: [ccp-dep] AFM roughness of SiNx Message-ID: Hello Folks, There some complaints about roughness on our CCP PECVD. I did the AFM on SiNx of 1700A at 350 C. The roughness is about 1.09 nm. Attached is the image. Our roughness values are just fine and comparable to the literature. Cheers, Pradeep/pnataraj -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: CCP_PECVD_SiNx.tif Type: image/tiff Size: 794502 bytes Desc: not available URL: From mtang at stanford.edu Wed Mar 6 17:42:25 2013 From: mtang at stanford.edu (Mary Tang) Date: Wed, 06 Mar 2013 17:42:25 -0800 Subject: [ccp-dep] AFM roughness of SiNx In-Reply-To: References: Message-ID: <5137F081.1060906@stanford.edu> Thanks Pradeep!!! An Ike's sandwich, on me. By the way, is this just the standard recipe? M On 3/6/2013 4:26 PM, Pradeep Nataraj wrote: > Hello Folks, > > There some complaints about roughness on our CCP PECVD. > > I did the AFM on SiNx of 1700A at 350 C. > The roughness is about 1.09 nm. Attached is the image. > > Our roughness values are just fine and comparable to the literature. > > Cheers, > > Pradeep/pnataraj -------------- next part -------------- An HTML attachment was scrubbed... URL: From nlatta at stanford.edu Wed Mar 6 17:44:27 2013 From: nlatta at stanford.edu (Nancy Latta) Date: Wed, 06 Mar 2013 17:44:27 -0800 Subject: [ccp-dep] AFM roughness of SiNx In-Reply-To: <5137F081.1060906@stanford.edu> References: <5137F081.1060906@stanford.edu> Message-ID: <5137F0FB.2070105@stanford.edu> This is for the SiN recipe we use for the quals. Yeah, and thanks, -Nancy On 3/6/2013 5:42 PM, Mary Tang wrote: > Thanks Pradeep!!! > > An Ike's sandwich, on me. > > By the way, is this just the standard recipe? > > M > > On 3/6/2013 4:26 PM, Pradeep Nataraj wrote: >> Hello Folks, >> >> There some complaints about roughness on our CCP PECVD. >> >> I did the AFM on SiNx of 1700A at 350 C. >> The roughness is about 1.09 nm. Attached is the image. >> >> Our roughness values are just fine and comparable to the literature. >> >> Cheers, >> >> Pradeep/pnataraj > -------------- next part -------------- An HTML attachment was scrubbed... URL: From mtang at stanford.edu Wed Mar 6 17:45:32 2013 From: mtang at stanford.edu (Mary Tang) Date: Wed, 06 Mar 2013 17:45:32 -0800 Subject: [ccp-dep] AFM roughness of SiNx In-Reply-To: <5137F0FB.2070105@stanford.edu> References: <5137F081.1060906@stanford.edu> <5137F0FB.2070105@stanford.edu> Message-ID: <5137F13C.3060901@stanford.edu> You know me, I'm thinking NNIN process blog. Well, after the SNF wiki, of course. M On 3/6/2013 5:44 PM, Nancy Latta wrote: > This is for the SiN recipe we use for the quals. > > Yeah, and thanks, > > -Nancy > > On 3/6/2013 5:42 PM, Mary Tang wrote: >> Thanks Pradeep!!! >> >> An Ike's sandwich, on me. >> >> By the way, is this just the standard recipe? >> >> M >> >> On 3/6/2013 4:26 PM, Pradeep Nataraj wrote: >>> Hello Folks, >>> >>> There some complaints about roughness on our CCP PECVD. >>> >>> I did the AFM on SiNx of 1700A at 350 C. >>> The roughness is about 1.09 nm. Attached is the image. >>> >>> Our roughness values are just fine and comparable to the literature. >>> >>> Cheers, >>> >>> Pradeep/pnataraj >> > -------------- next part -------------- An HTML attachment was scrubbed... URL: From nlatta at stanford.edu Tue Mar 12 15:01:46 2013 From: nlatta at stanford.edu (Nancy Latta) Date: Tue, 12 Mar 2013 15:01:46 -0700 Subject: [ccp-dep] Please remove reservations you can't use Message-ID: <513FA5CA.8060303@stanford.edu> Folks, The tool has gotten enough traffic now that we need to pay attention to removing reservations so others can pick them up. Thanks, -Nancy