[ccp-dep] AFM roughness of SiNx

Pradeep Nataraj pradeep.nataraj at gmail.com
Wed Mar 6 16:26:06 PST 2013

Hello Folks,

There some complaints about roughness on our CCP PECVD.

I did the AFM on SiNx of 1700A at 350 C.
The roughness is about 1.09 nm. Attached is the image.

Our roughness values are just fine and comparable to the literature.


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