[ccp-dep] AFM roughness of SiNx

Mary Tang mtang at stanford.edu
Wed Mar 6 17:42:25 PST 2013


Thanks Pradeep!!!

An Ike's sandwich, on me.

By the way, is this just the standard recipe?

M

On 3/6/2013 4:26 PM, Pradeep Nataraj wrote:
> Hello Folks,
>
> There some complaints about roughness on our CCP PECVD.
>
> I did the AFM on SiNx of 1700A at 350 C.
> The roughness is about 1.09 nm. Attached is the image.
>
> Our roughness values are just fine and comparable to the literature.
>
> Cheers,
>
> Pradeep/pnataraj

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