[ccp-dep] AFM roughness of SiNx

Nancy Latta nlatta at stanford.edu
Wed Mar 6 17:44:27 PST 2013


This is for the SiN recipe we use for the quals.

Yeah, and thanks,

-Nancy

On 3/6/2013 5:42 PM, Mary Tang wrote:
> Thanks Pradeep!!!
>
> An Ike's sandwich, on me.
>
> By the way, is this just the standard recipe?
>
> M
>
> On 3/6/2013 4:26 PM, Pradeep Nataraj wrote:
>> Hello Folks,
>>
>> There some complaints about roughness on our CCP PECVD.
>>
>> I did the AFM on SiNx of 1700A at 350 C.
>> The roughness is about 1.09 nm. Attached is the image.
>>
>> Our roughness values are just fine and comparable to the literature.
>>
>> Cheers,
>>
>> Pradeep/pnataraj
>

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