[ccp-dep] AFM roughness of SiNx
mtang at stanford.edu
Wed Mar 6 17:45:32 PST 2013
You know me, I'm thinking NNIN process blog. Well, after the SNF wiki,
On 3/6/2013 5:44 PM, Nancy Latta wrote:
> This is for the SiN recipe we use for the quals.
> Yeah, and thanks,
> On 3/6/2013 5:42 PM, Mary Tang wrote:
>> Thanks Pradeep!!!
>> An Ike's sandwich, on me.
>> By the way, is this just the standard recipe?
>> On 3/6/2013 4:26 PM, Pradeep Nataraj wrote:
>>> Hello Folks,
>>> There some complaints about roughness on our CCP PECVD.
>>> I did the AFM on SiNx of 1700A at 350 C.
>>> The roughness is about 1.09 nm. Attached is the image.
>>> Our roughness values are just fine and comparable to the literature.
-------------- next part --------------
An HTML attachment was scrubbed...
More information about the ccp-dep