[ccp-dep] AFM roughness of SiNx

Mary Tang mtang at stanford.edu
Wed Mar 6 17:45:32 PST 2013


You know me, I'm thinking NNIN process blog.  Well, after the SNF wiki, 
of course.

M

On 3/6/2013 5:44 PM, Nancy Latta wrote:
> This is for the SiN recipe we use for the quals.
>
> Yeah, and thanks,
>
> -Nancy
>
> On 3/6/2013 5:42 PM, Mary Tang wrote:
>> Thanks Pradeep!!!
>>
>> An Ike's sandwich, on me.
>>
>> By the way, is this just the standard recipe?
>>
>> M
>>
>> On 3/6/2013 4:26 PM, Pradeep Nataraj wrote:
>>> Hello Folks,
>>>
>>> There some complaints about roughness on our CCP PECVD.
>>>
>>> I did the AFM on SiNx of 1700A at 350 C.
>>> The roughness is about 1.09 nm. Attached is the image.
>>>
>>> Our roughness values are just fine and comparable to the literature.
>>>
>>> Cheers,
>>>
>>> Pradeep/pnataraj
>>
>

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