From emyers at snf.stanford.edu Tue Nov 13 08:45:46 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 13 Nov 2007 08:45:46 -0800 Subject: Shutdown cmp SNF 2007-11-12 15:21:36: Wafer will not chuck Message-ID: The clamp ring for the wafer chuck was not fully tight. Took off the head, wiped down the surfaces and re-installed. Did not run a wafer, but it seems to respond to chucking switch. From gyama at snf.stanford.edu Tue Nov 13 14:08:29 2007 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 13 Nov 2007 14:08:29 -0800 Subject: Shutdown cmp SNF 2007-11-13 14:08:29: making grinding noise, Message-ID: vendor notified, need to have fixed ASAP also, switched to non-metal From gyama at snf.stanford.edu Fri Nov 16 09:26:21 2007 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 16 Nov 2007 09:26:21 -0800 Subject: Comment cmp SNF 2007-11-16 09:26:20: can someone enable at noon today? vendor will be here Message-ID: From emyers at snf.stanford.edu Fri Nov 16 15:29:26 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 16 Nov 2007 15:29:26 -0800 Subject: Shutdown cmp SNF 2007-11-13 14:08:29: making grinding noise, Message-ID: GnP came in and adjucted Head1. 5 minute run -good From emyers at snf.stanford.edu Fri Nov 16 15:29:35 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 16 Nov 2007 15:29:35 -0800 Subject: Comment cmp SNF 2007-11-16 09:26:20: can someone enable at noon today? vendor will be here Message-ID: done