Shutdown cmp SNF 2007-11-12 15:21:36: Wafer will not chuck

emyers at snf.stanford.edu emyers at snf.stanford.edu
Tue Nov 13 08:45:46 PST 2007


The clamp ring for the wafer chuck was not fully tight.  Took off the head, wiped down the surfaces and re-installed.  Did not run a wafer, but it seems to respond to chucking switch.




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