From kimsangb at snf.stanford.edu Sat Mar 1 22:36:56 2008 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Sat, 1 Mar 2008 22:36:56 -0800 Subject: Problem cmp SNF 2008-03-01 22:36:56: door interlock is not working Message-ID: The left door can not disable the interlock. I had to use the tool to disable it. From kimsangb at snf.stanford.edu Mon Mar 3 17:20:10 2008 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Mon, 3 Mar 2008 17:20:10 -0800 Subject: Problem cmp SNF 2008-03-03 17:20:04: Using head1 and head2 simultaneously Message-ID: If head1 (with wafer) and head2 are used simultaneously while polishiing, it creates strong vibration in the system and makes a big noise. From gyama at snf.stanford.edu Wed Mar 5 13:27:14 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Wed, 5 Mar 2008 13:27:14 -0800 Subject: Comment cmp SNF 2008-03-05 13:27:13: clean non-metal now Message-ID: From emyers at snf.stanford.edu Tue Mar 11 08:09:32 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 11 Mar 2008 08:09:32 -0700 Subject: Problem cmp SNF 2008-03-01 22:36:56: door interlock is not working Message-ID: Adjusted door interlock sensors From lwchang at snf.stanford.edu Tue Mar 11 15:58:16 2008 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Tue, 11 Mar 2008 15:58:16 -0700 Subject: Problem cmp SNF 2008-03-11 15:58:15: could not use the machine Message-ID: head1 with dummy made a big noise when trying to polish. While conditioning the pads using head2 was okay. From gyama at snf.stanford.edu Tue Mar 11 18:53:01 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 11 Mar 2008 18:53:01 -0700 Subject: Problem cmp SNF 2008-03-11 18:53:01: head stopping table, vendor emailed Message-ID: metal set-up now From mmessana at snf.stanford.edu Wed Mar 19 10:08:13 2008 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Wed, 19 Mar 2008 10:08:13 -0700 Subject: Comment cmp SNF 2008-03-19 10:08:12: Non-metal worked ok after adjusments/cleaning Message-ID: From gyama at snf.stanford.edu Wed Mar 19 15:30:03 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Wed, 19 Mar 2008 15:30:03 -0700 Subject: Comment cmp SNF 2008-03-19 15:30:02: new non-metal pad is now... Message-ID: SUBA 500II for non-topology looking into IC1000 stiff pad for topology Si & Oxide From kimsangb at snf.stanford.edu Mon Mar 24 12:11:42 2008 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Mon, 24 Mar 2008 12:11:42 -0700 Subject: Problem cmp SNF 2008-03-24 12:11:41: dirty metal setup Message-ID: From gyama at snf.stanford.edu Thu Mar 27 16:04:21 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Thu, 27 Mar 2008 16:04:21 -0700 Subject: Comment cmp SNF 2008-03-27 16:04:20: switching to non-metal FRI @ 11am Message-ID: From emyers at snf.stanford.edu Mon Mar 31 08:15:06 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 31 Mar 2008 08:15:06 -0700 Subject: Problem cmp SNF 2008-03-03 17:20:04: Using head1 and head2 simultaneously Message-ID: Vendor came in and made the head adjustments. From emyers at snf.stanford.edu Mon Mar 31 08:15:18 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 31 Mar 2008 08:15:18 -0700 Subject: Comment cmp SNF 2008-02-29 08:21:41: (Clean) Metal Configuration Message-ID: Old Message From emyers at snf.stanford.edu Mon Mar 31 08:15:27 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 31 Mar 2008 08:15:27 -0700 Subject: Comment cmp SNF 2008-03-05 13:27:13: clean non-metal now Message-ID: Old Message From emyers at snf.stanford.edu Mon Mar 31 08:16:03 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 31 Mar 2008 08:16:03 -0700 Subject: Problem cmp SNF 2008-03-11 15:58:15: could not use the machine Message-ID: Vendor came in and made head adjustments. From emyers at snf.stanford.edu Mon Mar 31 08:16:31 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 31 Mar 2008 08:16:31 -0700 Subject: Problem cmp SNF 2008-03-11 18:53:01: head stopping table, vendor emailed Message-ID: Vendor came in and made head adjustments. From emyers at snf.stanford.edu Mon Mar 31 08:16:47 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 31 Mar 2008 08:16:47 -0700 Subject: Comment cmp SNF 2008-03-19 10:08:12: Non-metal worked ok after adjusments/cleaning Message-ID: clearing messages. From emyers at snf.stanford.edu Mon Mar 31 08:17:20 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 31 Mar 2008 08:17:20 -0700 Subject: Problem cmp SNF 2008-03-24 12:11:41: dirty metal setup Message-ID: Old message