Problem cmp SNF 2008-03-03 17:20:04: Using head1 and head2 simultaneously

kimsangb at snf.stanford.edu kimsangb at snf.stanford.edu
Mon Mar 3 17:20:10 PST 2008


If head1 (with wafer) and head2 are used simultaneously while polishiing, it creates strong vibration in the system and makes a big noise.




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