From ehe at snf.stanford.edu Sat May 3 16:39:49 2008 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sat, 3 May 2008 16:39:49 -0700 Subject: Comment cmp SNF 2008-05-03 16:39:49: platen Message-ID: Tried running head with water to clear residual slurry from platen, that and wiping still left a thin layer of slurry residue. FYI. From kimsangb at snf.stanford.edu Mon May 12 21:01:19 2008 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Mon, 12 May 2008 21:01:19 -0700 Subject: Comment cmp SNF 2008-05-12 21:01:18: Dirty metal setup Message-ID: Au/Pt From cmcg at snf.stanford.edu Fri May 16 18:20:49 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Fri, 16 May 2008 18:20:49 -0700 Subject: Comment cmp SNF 2008-05-16 18:20:48: back to nonmetal, epd computer back up! Message-ID: CMP has been switched back to nonmetal. The harddrive for the end-point detection computer has been replaced, and the software reinstalled. It is working just as it did before. woohoo From emyers at snf.stanford.edu Mon May 19 08:01:38 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 19 May 2008 08:01:38 -0700 Subject: Comment cmp SNF 2008-04-14 08:31:12: Non-Metal Set-Up Message-ID: Changed out to Au contaminated From emyers at snf.stanford.edu Mon May 19 08:02:03 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 19 May 2008 08:02:03 -0700 Subject: Comment cmp SNF 2008-04-30 15:01:58: out of communal slurry Message-ID: On order. Ship date is 5/22 From emyers at snf.stanford.edu Mon May 19 08:02:26 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 19 May 2008 08:02:26 -0700 Subject: Comment cmp SNF 2008-05-03 16:39:49: platen Message-ID: Noted. Pad also looks worn. From emyers at snf.stanford.edu Mon May 19 08:02:48 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 19 May 2008 08:02:48 -0700 Subject: Comment cmp SNF 2008-05-12 21:01:18: Dirty metal setup Message-ID: Switched back to nonmetal set up.