Problem cmp SNF 2009-04-10 13:32:42: broken wafers

filip at snf.stanford.edu filip at snf.stanford.edu
Fri Apr 10 13:32:43 PDT 2009


broke 4 out of 8 wafers during chucking. This may be my inexperience, but the membrane bulged out, and then after pressing 'chucking' button vacuum pulls the wafer in, and any slight misalignment of the wafer from the ring caused a crack. 




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