From emyers at snf.stanford.edu Mon Aug 3 08:12:26 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 3 Aug 2009 08:12:26 -0700 Subject: Problem cmp SNF 2009-07-30 22:07:35: Broke wafer Message-ID: Adjusted Head1 height setting. Raja ran wafers following adjustment. From filip at snf.stanford.edu Wed Aug 5 09:41:10 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Wed, 5 Aug 2009 09:41:10 -0700 Subject: Problem cmp SNF 2009-08-05 09:41:09: MAJOR residue Message-ID: on head 1 and head 2. it appears as if no clean-up was done. I tried washing it with water. From filip at snf.stanford.edu Mon Aug 10 16:58:34 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Mon, 10 Aug 2009 16:58:34 -0700 Subject: Comment cmp SNF 2009-08-10 16:58:33: membrane non-metal Message-ID: has a deep scratch in it, also leaks air. Chucking still OK. From filip at snf.stanford.edu Mon Aug 10 16:59:53 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Mon, 10 Aug 2009 16:59:53 -0700 Subject: Comment cmp SNF 2009-08-10 16:59:53: pad Message-ID: has a 2" area with a dent in it (no groves present). The non-flat area can be easily felt by hand. From emyers at snf.stanford.edu Wed Aug 12 12:07:22 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 12 Aug 2009 12:07:22 -0700 Subject: Problem cmp SNF 2009-07-21 22:02:28: Out of S-10 slurry Message-ID: New Slurry Arrived From emyers at snf.stanford.edu Wed Aug 12 12:07:35 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 12 Aug 2009 12:07:35 -0700 Subject: Comment cmp SNF 2009-07-22 16:30:52: Week of Aug 10 for Slurries Message-ID: New Slurry Arrived From emyers at snf.stanford.edu Wed Aug 12 12:08:05 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 12 Aug 2009 12:08:05 -0700 Subject: Comment cmp SNF 2009-08-12 12:08:05: Slurry Arrived Message-ID: 10 Gal. of S-10 and 2-EX have arrived From gyama at snf.stanford.edu Tue Aug 18 15:27:44 2009 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 18 Aug 2009 15:27:44 -0700 Subject: Comment cmp SNF 2009-08-18 15:27:43: pad & membrane changed for cln non-metal Message-ID: one of the allen bolts for the table seemed to be cross threaded when removing table to replace pad. did not want to damage further, so left it out. put a piece of blue dicing tape over the hole for membrane, used the 1.5mm allen head wrench to clean out the dried slurry, then used the 2.5mm to take out the screws. this method worked well, no stripped threads. From filip at snf.stanford.edu Tue Aug 18 17:23:49 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Tue, 18 Aug 2009 17:23:49 -0700 Subject: Comment cmp SNF 2009-08-18 17:23:49: new membrane works well Message-ID: 90% of wafers get lifted with Head1 first few wafers had consistent scratches present. Most likely due to traces of purple grit used to scrub clean the table previously. Hopefully, situation improves over time. From emyers at snf.stanford.edu Wed Aug 19 08:21:38 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 19 Aug 2009 08:21:38 -0700 Subject: Comment cmp SNF 2009-07-21 22:03:24: Please clean Head2 after conditioning Message-ID: Archived From emyers at snf.stanford.edu Wed Aug 19 08:21:53 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 19 Aug 2009 08:21:53 -0700 Subject: Problem cmp SNF 2009-08-05 09:41:09: MAJOR residue Message-ID: Sent out reminding email. Archived From emyers at snf.stanford.edu Wed Aug 19 08:22:10 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 19 Aug 2009 08:22:10 -0700 Subject: Comment cmp SNF 2009-08-10 16:58:33: membrane non-metal Message-ID: Replaced membrane From emyers at snf.stanford.edu Wed Aug 19 08:22:18 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 19 Aug 2009 08:22:18 -0700 Subject: Comment cmp SNF 2009-08-10 16:59:53: pad Message-ID: Replaced Pad From emyers at snf.stanford.edu Wed Aug 19 08:22:27 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 19 Aug 2009 08:22:27 -0700 Subject: Comment cmp SNF 2009-08-12 12:08:05: Slurry Arrived Message-ID: Archived From jrjain at snf.stanford.edu Sat Aug 22 20:39:47 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Sat, 22 Aug 2009 20:39:47 -0700 Subject: Problem cmp SNF 2009-08-22 20:39:47: Scratched wafers Message-ID: Tool badly scratching wafers. Ran same procedure on wafers identical those processed successfully before. From filip at snf.stanford.edu Tue Aug 25 17:05:28 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Tue, 25 Aug 2009 17:05:28 -0700 Subject: Problem cmp SNF 2009-08-25 17:05:27: ran 8 dummies, 15min conditioning Message-ID: still scrathing.... can see clearly in dark-field. Maybe replace the pad again?