Problem cmp SNF 2009-08-22 20:39:47: Scratched wafers

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Sat Aug 22 20:39:47 PDT 2009


Tool badly scratching wafers.  Ran same procedure on wafers identical those processed successfully before.




More information about the cmp-pcs mailing list