Problem cmp SNF 2009-08-22 20:39:47: Scratched wafers

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Sat Aug 22 20:39:47 PDT 2009

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Tool badly scratching wafers.  Ran same procedure on wafers identical those processed successfully before.

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Next message: Problem cmp SNF 2009-08-25 17:05:27: ran 8 dummies, 15min conditioning
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