Problem cmp SNF 2009-07-30 22:07:35: Broke wafer

jrjain at jrjain at
Thu Jul 30 22:07:36 PDT 2009

Upon pressing Head 1 Up, heard a "pop" from Head 1.  Seemed like a release of pressure.  Then, noticed some pieces of wafer sliding out from under head.  Cleaned up pieces, but can't remove some small shards from CMP pad (tried toothbrush as well).

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