Problem cmp SNF 2009-07-30 22:07:35: Broke wafer

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Thu Jul 30 22:07:36 PDT 2009


Upon pressing Head 1 Up, heard a "pop" from Head 1.  Seemed like a release of pressure.  Then, noticed some pieces of wafer sliding out from under head.  Cleaned up pieces, but can't remove some small shards from CMP pad (tried toothbrush as well).




More information about the cmp-pcs mailing list