From emyers at snf.stanford.edu Mon Oct 5 08:33:53 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 5 Oct 2009 08:33:53 -0700 Subject: Problem cmp SNF 2009-09-30 10:34:41: wafer broke, changing pad Message-ID: verified operation, OK to clear. Per Gary Yama From filip at snf.stanford.edu Wed Oct 7 18:26:30 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Wed, 7 Oct 2009 18:26:30 -0700 Subject: Comment cmp SNF 2009-10-07 18:26:30: please do not remove Message-ID: the blue tape covering the hole on the platen. From cmcg at snf.stanford.edu Wed Oct 7 23:02:22 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Wed, 7 Oct 2009 23:02:22 -0700 Subject: Comment cmp SNF 2009-10-07 23:02:21: wafer broken Message-ID: I broke a wafer while loading in the chuck. I cleaned up the pieces as best I could and rinsed down the pad thouroughly. From emyers at snf.stanford.edu Mon Oct 19 16:48:16 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 19 Oct 2009 16:48:16 -0700 Subject: Comment cmp SNF 2009-10-19 16:48:16: Clean Metal Set-up Message-ID: From emyers at snf.stanford.edu Mon Oct 19 16:48:33 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 19 Oct 2009 16:48:33 -0700 Subject: Comment cmp SNF 2009-09-29 09:44:28: Clean Non-Metal Message-ID: Noted From cmcg at snf.stanford.edu Thu Oct 22 17:11:38 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Thu, 22 Oct 2009 17:11:38 -0700 Subject: Comment cmp SNF 2009-10-22 17:11:37: switched to clean nonmetal Message-ID: From filip at snf.stanford.edu Sat Oct 24 15:20:19 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Sat, 24 Oct 2009 15:20:19 -0700 Subject: Comment cmp SNF 2009-10-24 15:20:18: s-10 running out Message-ID: From filip at snf.stanford.edu Sat Oct 24 15:21:51 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Sat, 24 Oct 2009 15:21:51 -0700 Subject: Comment cmp SNF 2009-10-24 15:21:51: small scratches on Ge using S-10 Message-ID: possibly due to S-10 running out. Si polish is fine. From edmyers at stanford.edu Sat Oct 24 16:15:49 2009 From: edmyers at stanford.edu (Ed Myers) Date: Sat, 24 Oct 2009 16:15:49 -0700 Subject: Comment cmp SNF 2009-10-24 15:21:51: small scratches on Ge using S-10 In-Reply-To: <20091024222152.0FF781A06CD@smtp.stanford.edu> References: <20091024222152.0FF781A06CD@smtp.stanford.edu> Message-ID: <6.2.5.6.2.20091024161415.04f8e290@stanford.edu> All, We have at least 2 pails of S-10, they are being stored in the chemical storage area as in the past. At 03:21 PM 10/24/2009, filip at snf.stanford.edu wrote: >possibly due to S-10 running out. >Si polish is fine. From emyers at snf.stanford.edu Thu Oct 29 08:40:20 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 29 Oct 2009 08:40:20 -0700 Subject: Comment cmp SNF 2009-09-23 11:56:43: tested new s-10 slurry Message-ID: Archived From emyers at snf.stanford.edu Thu Oct 29 08:40:30 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 29 Oct 2009 08:40:30 -0700 Subject: Comment cmp SNF 2009-09-30 15:47:59: installed new pad, (last one) Message-ID: Archived From emyers at snf.stanford.edu Thu Oct 29 08:40:42 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 29 Oct 2009 08:40:42 -0700 Subject: Comment cmp SNF 2009-10-07 18:26:30: please do not remove Message-ID: Archived From emyers at snf.stanford.edu Thu Oct 29 08:40:52 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 29 Oct 2009 08:40:52 -0700 Subject: Comment cmp SNF 2009-10-07 23:02:21: wafer broken Message-ID: Archived From emyers at snf.stanford.edu Thu Oct 29 08:41:07 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 29 Oct 2009 08:41:07 -0700 Subject: Comment cmp SNF 2009-10-19 16:48:16: Clean Metal Set-up Message-ID: Archived From emyers at snf.stanford.edu Thu Oct 29 08:41:37 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 29 Oct 2009 08:41:37 -0700 Subject: Comment cmp SNF 2009-10-24 15:20:18: s-10 running out Message-ID: More pails in the storage room. Please plan ahead. From emyers at snf.stanford.edu Thu Oct 29 08:42:02 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 29 Oct 2009 08:42:02 -0700 Subject: Comment cmp SNF 2009-10-24 15:21:51: small scratches on Ge using S-10 Message-ID: More pails in the storage area. Please plan ahead.