Problem cmp SNF 2009-08-22 20:39:47: Scratched wafers

emyers at snf.stanford.edu emyers at snf.stanford.edu
Mon Sep 28 09:20:40 PDT 2009


Tested new slurry and consumable set.  Still seeing some scratching on Ge, but at reduced level.  I feel it is a cleanliness issue and not a consumable issue.




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