Comment cmp SNF 2009-09-29 09:44:28: Clean Non-Metal
emyers at snf.stanford.edu
emyers at snf.stanford.edu
Tue Sep 29 09:44:29 PDT 2009
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Problem cmp SNF 2009-08-25 17:05:27: ran 8 dummies, 15min conditioning
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Problem cmp SNF 2009-09-30 10:34:41: wafer broke, changing pad
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Problem cmp SNF 2009-08-25 17:05:27: ran 8 dummies, 15min conditioning
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Problem cmp SNF 2009-09-30 10:34:41: wafer broke, changing pad
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