From ryhuang at snf.stanford.edu Tue Jul 6 13:48:30 2010 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Tue, 6 Jul 2010 13:48:30 -0700 Subject: Comment cmp SNF 2010-07-06 13:48:29: Clean metal H/W Message-ID: Clean metal H/W installed From ryhuang at snf.stanford.edu Wed Jul 7 12:17:52 2010 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Wed, 7 Jul 2010 12:17:52 -0700 Subject: Problem cmp SNF 2010-07-07 12:17:51: chucking problem with Au H/W Message-ID: Changed to Au contaminated H/W set but now having problems keeping wafers on the polish head. The wafers seem to chuck fine when the head is up, but when the polishing starts, the wafer slips out of the polish head. Robert From filip at snf.stanford.edu Sat Jul 10 17:41:14 2010 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Sat, 10 Jul 2010 17:41:14 -0700 Subject: Comment cmp SNF 2010-07-10 17:41:14: clean non-metal Message-ID: From emyers at snf.stanford.edu Mon Jul 12 12:13:59 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:13:59 -0700 Subject: Problem cmp SNF 2010-07-07 12:17:51: chucking problem with Au H/W Message-ID: Regapped hardware set. Looks like we have one or two hardware sets with different gap requirements. From emyers at snf.stanford.edu Mon Jul 12 12:14:13 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:14:13 -0700 Subject: Comment cmp SNF 2010-06-16 13:31:50: Contaminated Set Message-ID: Archived From emyers at snf.stanford.edu Mon Jul 12 12:14:29 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:14:29 -0700 Subject: Comment cmp SNF 2010-06-23 14:58:41: clean metal h/w installed Message-ID: Archived From emyers at snf.stanford.edu Mon Jul 12 12:14:44 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:14:44 -0700 Subject: Comment cmp SNF 2010-06-29 22:27:32: clean non-metal Message-ID: Thank you From emyers at snf.stanford.edu Mon Jul 12 12:14:57 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:14:57 -0700 Subject: Comment cmp SNF 2010-07-06 13:48:29: Clean metal H/W Message-ID: Archived From emyers at snf.stanford.edu Mon Jul 12 12:16:31 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:16:31 -0700 Subject: Comment cmp SNF 2010-07-12 12:16:30: Gap Adjustment Message-ID: We are seeing the wafers slide out of some of the hardware sets during polishing, or hearing a load noise. It appears we have different gap adjustment requirements between hardware sets. If either of these happen, contact Ed Myers and have him regap the hardware. From ryhuang at snf.stanford.edu Mon Jul 12 13:49:41 2010 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Mon, 12 Jul 2010 13:49:41 -0700 Subject: Comment cmp SNF 2010-07-12 13:49:38: clean metal h/w Message-ID: Clean metal h/w installed. -Robert From filip at snf.stanford.edu Wed Jul 14 18:47:57 2010 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Wed, 14 Jul 2010 18:47:57 -0700 Subject: Comment cmp SNF 2010-07-14 18:47:57: clean non-metal Message-ID: From ryhuang at snf.stanford.edu Tue Jul 20 15:36:58 2010 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Tue, 20 Jul 2010 15:36:58 -0700 Subject: Comment cmp SNF 2010-07-20 15:36:57: Au contaminated h/w Message-ID: Au contaminated h/w installed. -Robert From emyers at snf.stanford.edu Wed Jul 21 08:39:09 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 21 Jul 2010 08:39:09 -0700 Subject: Comment cmp SNF 2010-07-10 17:41:14: clean non-metal Message-ID: archived From emyers at snf.stanford.edu Wed Jul 21 08:39:18 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 21 Jul 2010 08:39:18 -0700 Subject: Comment cmp SNF 2010-07-12 12:16:30: Gap Adjustment Message-ID: archived From emyers at snf.stanford.edu Wed Jul 21 08:39:27 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 21 Jul 2010 08:39:27 -0700 Subject: Comment cmp SNF 2010-07-12 13:49:38: clean metal h/w Message-ID: archived From emyers at snf.stanford.edu Wed Jul 21 08:39:38 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 21 Jul 2010 08:39:38 -0700 Subject: Comment cmp SNF 2010-07-14 18:47:57: clean non-metal Message-ID: archived From ryhuang at snf.stanford.edu Mon Jul 26 13:34:44 2010 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Mon, 26 Jul 2010 13:34:44 -0700 Subject: Comment cmp SNF 2010-07-26 13:34:44: clean metal h/w Message-ID: Clean metal h/w installed. -Robert