From emyers at snf.stanford.edu  Mon Mar  1 09:25:09 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Mon, 1 Mar 2010 09:25:09 -0800
Subject: Comment cmp SNF 2010-01-08 14:18:25: Gold Contaminated Set
Message-ID: <mailman.130.1356281227.3503.cmp-pcs@snf.stanford.edu>

Archived



From emyers at snf.stanford.edu  Mon Mar  1 09:25:21 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Mon, 1 Mar 2010 09:25:21 -0800
Subject: Comment cmp SNF 2010-03-01 09:25:21: Gold Contaminated Set
Message-ID: <mailman.131.1356281227.3503.cmp-pcs@snf.stanford.edu>




From emyers at snf.stanford.edu  Wed Mar 10 14:09:00 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Wed, 10 Mar 2010 14:09:00 -0800
Subject: Comment cmp SNF 2010-03-01 09:25:21: Gold Contaminated Set
Message-ID: <mailman.132.1356281227.3503.cmp-pcs@snf.stanford.edu>

Archived



From emyers at snf.stanford.edu  Wed Mar 10 14:09:18 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Wed, 10 Mar 2010 14:09:18 -0800
Subject: Comment cmp SNF 2010-03-10 14:09:17: Clean Metal Set
Message-ID: <mailman.133.1356281227.3503.cmp-pcs@snf.stanford.edu>




From emyers at snf.stanford.edu  Fri Mar 12 15:48:57 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Fri, 12 Mar 2010 15:48:57 -0800
Subject: Comment cmp SNF 2010-03-10 14:09:17: Clean Metal Set
Message-ID: <mailman.134.1356281227.3503.cmp-pcs@snf.stanford.edu>

archived



From emyers at snf.stanford.edu  Fri Mar 12 15:49:09 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Fri, 12 Mar 2010 15:49:09 -0800
Subject: Comment cmp SNF 2010-03-12 15:49:09: Gold set
Message-ID: <mailman.135.1356281227.3503.cmp-pcs@snf.stanford.edu>




From sipark at snf.stanford.edu  Fri Mar 12 17:55:17 2010
From: sipark at snf.stanford.edu (sipark at snf.stanford.edu)
Date: Fri, 12 Mar 2010 17:55:17 -0800
Subject: Problem cmp SNF 2010-03-12 17:55:16: Problem with chucking
Message-ID: <mailman.136.1356281227.3503.cmp-pcs@snf.stanford.edu>

There is some problem with chucking wafer.
It doesn't hold the wafer, filip and I tried several times, but it didn't work.



From emyers at snf.stanford.edu  Tue Mar 16 09:21:01 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Tue, 16 Mar 2010 09:21:01 -0700
Subject: Comment cmp SNF 2010-03-12 15:49:09: Gold set
Message-ID: <mailman.137.1356281227.3503.cmp-pcs@snf.stanford.edu>

Archived



From emyers at snf.stanford.edu  Tue Mar 16 09:21:17 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Tue, 16 Mar 2010 09:21:17 -0700
Subject: Comment cmp SNF 2010-03-16 09:21:16: Clean Metal
Message-ID: <mailman.138.1356281227.3503.cmp-pcs@snf.stanford.edu>




From emyers at snf.stanford.edu  Tue Mar 16 09:22:04 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Tue, 16 Mar 2010 09:22:04 -0700
Subject: Problem cmp SNF 2010-03-12 17:55:16: Problem with chucking
Message-ID: <mailman.139.1356281227.3503.cmp-pcs@snf.stanford.edu>

Changed membrane and was able to chuck wafers



From emyers at snf.stanford.edu  Wed Mar 17 09:56:06 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Wed, 17 Mar 2010 09:56:06 -0700
Subject: Problem cmp SNF 2010-02-16 17:22:33: non-metal pad groove-less.
Message-ID: <mailman.140.1356281227.3503.cmp-pcs@snf.stanford.edu>

New pad installed