Problem cmp SNF 2010-03-12 17:55:16: Problem with chucking
emyers at snf.stanford.edu
emyers at snf.stanford.edu
Tue Mar 16 09:22:04 PDT 2010
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Problem cmp SNF 2010-03-12 17:55:16: Problem with chucking
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Comment cmp SNF 2010-03-16 09:21:16: Clean Metal
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Changed membrane and was able to chuck wafers
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Problem cmp SNF 2010-03-12 17:55:16: Problem with chucking
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Comment cmp SNF 2010-03-16 09:21:16: Clean Metal
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