From ryhuang at snf.stanford.edu  Thu May  6 17:18:25 2010
From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu)
Date: Thu, 6 May 2010 17:18:25 -0700
Subject: Comment cmp SNF 2010-05-06 17:18:25: clean metal h/w installed
Message-ID: <mailman.142.1356281227.3503.cmp-pcs@snf.stanford.edu>




From emyers at snf.stanford.edu  Mon May 17 08:37:01 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Mon, 17 May 2010 08:37:01 -0700
Subject: Comment cmp SNF 2010-05-06 17:18:25: clean metal h/w installed
Message-ID: <mailman.143.1356281227.3503.cmp-pcs@snf.stanford.edu>

archived



From emyers at snf.stanford.edu  Mon May 17 08:37:09 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Mon, 17 May 2010 08:37:09 -0700
Subject: Comment cmp SNF 2010-03-16 09:21:16: Clean Metal
Message-ID: <mailman.144.1356281227.3503.cmp-pcs@snf.stanford.edu>

archived



From emyers at snf.stanford.edu  Mon May 17 08:37:20 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Mon, 17 May 2010 08:37:20 -0700
Subject: Comment cmp SNF 2010-05-17 08:37:19: gold contaminated set
Message-ID: <mailman.145.1356281227.3503.cmp-pcs@snf.stanford.edu>




From emyers at snf.stanford.edu  Mon May 17 08:38:18 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Mon, 17 May 2010 08:38:18 -0700
Subject: Comment cmp SNF 2010-04-06 16:00:42: bubbles?
Message-ID: <mailman.146.1356281227.3503.cmp-pcs@snf.stanford.edu>

Leaking through membrane.  OK to use, but it may leave the wafer on the pad at end of cycle.



From emyers at snf.stanford.edu  Mon May 24 16:17:10 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Mon, 24 May 2010 16:17:10 -0700
Subject: Comment cmp SNF 2010-05-24 16:17:09: Clean Non-Metal
Message-ID: <mailman.147.1356281227.3503.cmp-pcs@snf.stanford.edu>




From emyers at snf.stanford.edu  Mon May 24 16:17:22 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Mon, 24 May 2010 16:17:22 -0700
Subject: Comment cmp SNF 2010-05-17 08:37:19: gold contaminated set
Message-ID: <mailman.148.1356281227.3503.cmp-pcs@snf.stanford.edu>

archived



From emyers at snf.stanford.edu  Mon May 24 16:18:32 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Mon, 24 May 2010 16:18:32 -0700
Subject: Problem cmp SNF 2010-05-24 16:18:31: Clean nonmetal membrane
Message-ID: <mailman.149.1356281227.3503.cmp-pcs@snf.stanford.edu>

There seems to be a leak in the clean non-metal membrane.  Vacuum chucking proably will not work, only surface tension.  I need to look at my membrane inventory.



From filip at snf.stanford.edu  Mon May 24 20:44:52 2010
From: filip at snf.stanford.edu (filip at snf.stanford.edu)
Date: Mon, 24 May 2010 20:44:52 -0700
Subject: Problem cmp SNF 2010-05-24 20:44:52: non-metal pad bare
Message-ID: <mailman.150.1356281227.3503.cmp-pcs@snf.stanford.edu>

no grooves at all.
Could we please schedule to change the pad?
It seems that it had a good run, but it's done.