From grahamab at snf.stanford.edu Tue Nov 2 13:13:54 2010 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Tue, 2 Nov 2010 13:13:54 -0700 Subject: Comment cmp SNF 2010-11-02 13:13:53: clean non-metal installed Message-ID: From emyers at snf.stanford.edu Wed Nov 3 08:51:08 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 3 Nov 2010 08:51:08 -0700 Subject: Comment cmp SNF 2010-11-03 08:51:06: Gold Hardware Message-ID: Switched to gold hardware set and gapped the tool. From emyers at snf.stanford.edu Wed Nov 3 08:51:22 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 3 Nov 2010 08:51:22 -0700 Subject: Comment cmp SNF 2010-10-14 17:04:59: Gold Hardware Message-ID: archived From emyers at snf.stanford.edu Wed Nov 3 08:51:37 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 3 Nov 2010 08:51:37 -0700 Subject: Comment cmp SNF 2010-10-27 10:18:19: Au set-up Message-ID: Archived From emyers at snf.stanford.edu Wed Nov 3 08:51:49 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 3 Nov 2010 08:51:49 -0700 Subject: Comment cmp SNF 2010-11-02 13:13:53: clean non-metal installed Message-ID: Archived From emyers at snf.stanford.edu Wed Nov 3 08:51:58 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 3 Nov 2010 08:51:58 -0700 Subject: Comment cmp SNF 2010-10-27 13:08:44: used ~2" of S-10 slurry for 45' polish Message-ID: Archived From helenchung25 at snf.stanford.edu Wed Nov 3 11:51:56 2010 From: helenchung25 at snf.stanford.edu (helenchung25 at snf.stanford.edu) Date: Wed, 3 Nov 2010 11:51:56 -0700 Subject: Shutdown cmp SNF 2010-11-03 11:51:56: wafer breaking Message-ID: wfr keep on breaking in the carrier during polishing. needs carrier downforce calibration. From helenchung25 at snf.stanford.edu Wed Nov 3 14:34:35 2010 From: helenchung25 at snf.stanford.edu (helenchung25 at snf.stanford.edu) Date: Wed, 3 Nov 2010 14:34:35 -0700 Subject: Problem cmp SNF 2010-11-03 14:34:34: wfaer breakage Message-ID: wfr breaks in the carrier during polishing. maybe needs downforce calibration. From mtang at snf.stanford.edu Wed Nov 3 14:56:04 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 3 Nov 2010 14:56:04 -0700 Subject: Shutdown cmp SNF 2010-11-03 11:51:56: wafer breaking Message-ID: As per Ed, rhuang is qualified to calibrated the gap and will perform this to try to address the breakage problem. From helenchung25 at snf.stanford.edu Wed Nov 3 16:24:34 2010 From: helenchung25 at snf.stanford.edu (helenchung25 at snf.stanford.edu) Date: Wed, 3 Nov 2010 16:24:34 -0700 Subject: Comment cmp SNF 2010-11-03 16:24:34: cmp tool o.k. Message-ID: after carrier and platen gap calibration by rober huang , cmp o.k. without breaking wafers. :) From gyama at snf.stanford.edu Fri Nov 12 08:26:16 2010 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 12 Nov 2010 08:26:16 -0800 Subject: Comment cmp SNF 2010-11-12 08:26:15: Au conditioning head not cleaned thoroughly Message-ID: lots of dried slurry between disks From gyama at snf.stanford.edu Fri Nov 12 10:24:57 2010 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 12 Nov 2010 10:24:57 -0800 Subject: Comment cmp SNF 2010-11-12 10:24:57: 35' polish used ~1" of S-10 Message-ID: From emyers at snf.stanford.edu Wed Nov 17 09:22:13 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 17 Nov 2010 09:22:13 -0800 Subject: Comment cmp SNF 2010-11-03 08:51:06: Gold Hardware Message-ID: Set changed out From grahamab at snf.stanford.edu Wed Nov 24 11:26:36 2010 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Wed, 24 Nov 2010 11:26:36 -0800 Subject: Comment cmp SNF 2010-11-24 11:26:35: clean non-metal pad needs changed Message-ID: grooves are almost entirely gone and only show up on outer edge of pad. From emyers at snf.stanford.edu Tue Nov 30 09:27:07 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 30 Nov 2010 09:27:07 -0800 Subject: Problem cmp SNF 2010-09-20 22:14:42: non-metal pad bare Message-ID: Replaced pad From emyers at snf.stanford.edu Tue Nov 30 09:27:18 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 30 Nov 2010 09:27:18 -0800 Subject: Comment cmp SNF 2010-11-24 11:26:35: clean non-metal pad needs changed Message-ID: Replaced pad From emyers at snf.stanford.edu Tue Nov 30 09:27:28 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 30 Nov 2010 09:27:28 -0800 Subject: Comment cmp SNF 2010-11-12 10:24:57: 35' polish used ~1" of S-10 Message-ID: Archived From emyers at snf.stanford.edu Tue Nov 30 09:27:43 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 30 Nov 2010 09:27:43 -0800 Subject: Comment cmp SNF 2010-11-12 08:26:15: Au conditioning head not cleaned thoroughly Message-ID: Archived, but I hope it was read by the lab members From emyers at snf.stanford.edu Tue Nov 30 09:27:53 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 30 Nov 2010 09:27:53 -0800 Subject: Comment cmp SNF 2010-11-03 16:24:34: cmp tool o.k. Message-ID: archived From emyers at snf.stanford.edu Tue Nov 30 09:28:10 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 30 Nov 2010 09:28:10 -0800 Subject: Problem cmp SNF 2010-11-03 14:34:34: wfaer breakage Message-ID: regapped spacing