Comment cmp SNF 2010-11-03 16:24:34: cmp tool o.k.

helenchung25 at snf.stanford.edu helenchung25 at snf.stanford.edu
Wed Nov 3 16:24:34 PDT 2010

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after carrier and platen gap calibration by rober huang , cmp o.k. without breaking wafers.  :)

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