From emyers at snf.stanford.edu Thu Jun 2 14:26:07 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 2 Jun 2011 14:26:07 -0700 Subject: Comment cmp SNF 2011-05-12 15:41:27: Clean Metal Hardware Message-ID: Archived From emyers at snf.stanford.edu Thu Jun 2 14:29:38 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 2 Jun 2011 14:29:38 -0700 Subject: Comment cmp SNF 2011-06-02 14:29:37: Gold Hardware Set Message-ID: Replaced the membrane on the hardware set. It is a new type of membrane has an adhesive on the back side. I'm not sure if the chucking and dechucking will work the same. From emyers at snf.stanford.edu Thu Jun 2 14:30:01 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 2 Jun 2011 14:30:01 -0700 Subject: Comment cmp SNF 2011-06-02 14:30:01: New Membrane on gold set Message-ID: Replaced the membrane on the hardware set. It is a new type of membrane has an adhesive on the back side. I'm not sure if the chucking and dechucking will work the same. From emyers at snf.stanford.edu Mon Jun 6 11:17:39 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 6 Jun 2011 11:17:39 -0700 Subject: Problem cmp SNF 2011-06-06 11:17:39: Gold HW set Problem Message-ID: It has been reported the Gold Hardware set is not polishing. A lab member reports there is no material removal. This problem is related to the gold hardware set, but should not effect the other hardware sets. I do not know if the Gold HW set problems is related to the new membrane or the set up following the HW change. From grahamab at snf.stanford.edu Tue Jun 7 23:55:36 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Tue, 7 Jun 2011 23:55:36 -0700 Subject: Comment cmp SNF 2011-06-07 23:55:36: clean non-metal hardware now installed Message-ID: clean, non-metal hardware is installed on the tool. From grahamab at snf.stanford.edu Wed Jun 8 13:06:14 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Wed, 8 Jun 2011 13:06:14 -0700 Subject: Comment cmp SNF 2011-06-08 13:06:14: gold hardware reinstalled Message-ID: gold hardware set is now installed. From grahamab at snf.stanford.edu Thu Jun 16 11:17:48 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Thu, 16 Jun 2011 11:17:48 -0700 Subject: Comment cmp SNF 2011-06-16 11:17:47: clean non-metal hardware set installed Message-ID: tool is setup for clean non-metal. From ryhuang at snf.stanford.edu Tue Jun 28 15:37:35 2011 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Tue, 28 Jun 2011 15:37:35 -0700 Subject: Comment cmp SNF 2011-06-28 15:37:34: clean metal h/w Message-ID: Clean metal h/w installed. -Robert From gyama at snf.stanford.edu Wed Jun 29 08:00:14 2011 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Wed, 29 Jun 2011 08:00:14 -0700 Subject: Comment cmp SNF 2011-06-29 08:00:14: new cln non-metal pad installed Message-ID: also non-metal set-up From gyama at snf.stanford.edu Wed Jun 29 12:12:43 2011 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Wed, 29 Jun 2011 12:12:43 -0700 Subject: Comment cmp SNF 2011-06-29 12:12:43: is there a spare bucket of S-10? Message-ID: current one is ~ 1/3 full