Comment cmp SNF 2011-11-03 12:51:22: Clean Nonmetal hardware is installed
wangss at snf.stanford.edu
wangss at snf.stanford.edu
Thu Nov 3 12:51:23 PDT 2011
there is a little rubber smear on the pad. But it does not affect the polishing. Surface of the wafers come out to be fine.
More information about the cmp-pcs
mailing list