From emyers at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Comment cmp SNF 2012-08-17 08:45:07: Clean Non-Metal Message-ID: <20298643.115.1345218308266.JavaMail.coral@shine> Clean Non-metal hardware set installed From eldwin at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Comment cmp SNF 2012-08-17 17:16:11: di water pump tube came loose Message-ID: <9702992.184.1345248972802.JavaMail.coral@shine> DI water tube came off the pump and was replaced by jim. all good now From emyers at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Comment cmp SNF 2012-08-22 16:29:54: Gold Hardware Message-ID: <28948422.66.1345678195668.JavaMail.coral@shine> Gold hardware set installed From eldwin at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Comment cmp SNF 2012-08-29 11:10:27: clean non-metal hardware Message-ID: <29443516.76.1346263828195.JavaMail.coral@shine> installed by gary yama From gyama at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Problem cmp SNF 2012-08-30 10:22:31: new membrane, cln non-metal Message-ID: <8519196.114.1346347351355.JavaMail.coral@shine> From gyama at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Comment cmp SNF 2012-08-30 10:22:57: new membrane installed, cln non-metal Message-ID: <21155503.115.1346347377432.JavaMail.coral@shine> From kavehm at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: kavehm at snf.stanford.edu (kavehm at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Comment cmp SNF 2012-08-30 13:50:59: gold contaminated hardware installed Message-ID: <2898362.135.1346359859558.JavaMail.coral@shine> From derickson at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: derickson at snf.stanford.edu (derickson at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Comment cmp SNF 2012-09-04 16:54:36: DI water line comes off Message-ID: <20915237.28.1346802876361.JavaMail.coral@shine> The DI water line after the pump comes off. Water sprayed on bottom of tool and floor. Cleaned up after found problem. Replaced the line by pressing back into sleeve, but need to watch during DI water rinse. From mmrincon at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Problem cmp SNF 2012-08-30 10:22:31: new membrane, cln non-metal Message-ID: <22175135.48.1346888756750.JavaMail.coral@shine> documented in comments From zzp at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Comment cmp SNF 2012-09-17 10:45:53: request for gold-contaminated hardware Message-ID: <28117308.0.1347903954031.JavaMail.coral@shine> My run is planned on this Friday. Thank you so much From gyama at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Comment cmp SNF 2012-09-21 11:38:59: We switched over to Gold hardware Message-ID: <30553650.15.1348252739436.JavaMail.coral@shine> From gyama at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Problem cmp SNF 2012-09-21 11:39:32: air leak in back when head is going down Message-ID: <5716384.16.1348252773487.JavaMail.coral@shine> Jim H looking at From eldwin at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Shutdown cmp SNF 2012-09-27 13:17:29: air hose connector defective Message-ID: <30348344.71.1348777050367.JavaMail.coral@shine> air hose not connected and applying pressure to head; wafer slips off when polishing. Jim H has ordered a new part From gyama at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Comment cmp SNF 2012-10-02 15:21:25: new valve installed Message-ID: <10651400.16.1349216486505.JavaMail.coral@shine> head speed, up & down adjusted. gap also adjusted. OK to test out. gyama clean non-metal hardware From mmrincon at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Shutdown cmp SNF 2012-09-27 13:17:29: air hose connector defective Message-ID: <19534397.17.1349217474751.JavaMail.coral@shine> jim repaired- works now From derickson at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: derickson at snf.stanford.edu (derickson at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Comment cmp SNF 2012-10-03 09:38:42: Gold contaminated hardware change Message-ID: <22819062.9.1349282322736.JavaMail.coral@shine> If possible I would like to request gold hardware to be installed for CMP time late today or early tomorrow morning. Would change ourselves but Kaveh is out this week. From jhaydon at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Problem cmp SNF 2012-09-21 11:39:32: air leak in back when head is going down Message-ID: <6982940.63.1349446806069.JavaMail.coral@shine> air leak fixed From jhaydon at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Problem cmp SNF 2012-06-21 09:35:05: pump and water were on when I arrived Message-ID: <32121567.64.1349446970650.JavaMail.coral@shine> problem resolved From derickson at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: derickson at snf.stanford.edu (derickson at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Comment cmp SNF 2012-10-08 12:23:25: Gold contaminated hardware installed Message-ID: <4190579.25.1349724206009.JavaMail.coral@shine> Installed the gold contaminated hardware with Kaveh. Ultra-sol 2EX is at 50% bucket remaining. From jhaydon at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Problem cmp SNF 2012-06-08 15:59:44: previous user did Message-ID: <7176768.20.1350568702004.JavaMail.coral@shine> cleared From jhaydon at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Problem cmp SNF 2012-07-05 14:41:38: conditioning head auto recipes Message-ID: <18417120.23.1350572036159.JavaMail.coral@shine> issue has been resolved From derickson at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: derickson at snf.stanford.edu (derickson at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Shutdown cmp SNF 2012-11-01 11:42:40: Bladder torn Message-ID: <2499612.151.1351795360793.JavaMail.coral@shine> During conditioning of pad, with head 2 and head 1 down we noticed a very light "squeaking" noise. Stopped the tool and ran a dummy wafer to make sure everything is OK. During dummy run wafer was dropped and bladder was torn. Unkown if noise was because of bladder failing or if head is making noise. Thanks, Dustin From mmrincon at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Shutdown cmp SNF 2012-11-01 11:42:40: Bladder torn Message-ID: <6033738.160.1351810249263.JavaMail.coral@shine> Changing now From gyama at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Problem cmp SNF 2012-11-01 16:12:52: changed gold membrane, check Message-ID: <16922781.161.1351811572592.JavaMail.coral@shine> with dummy before doing your real wafers From eldwin at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Problem cmp SNF 2012-11-05 21:39:37: squeaking noise when heads are oscillating Message-ID: <765019.44.1352180377614.JavaMail.coral@shine> squeaking / rubbing noise during cmp when head is set to oscillate. With the head and the pad rotating but not oscillating, there is no squeaking. Squeaking occurs even when the head is not in contact with the pad but just set to oscillate. From faridz at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Comment cmp SNF 2012-11-08 16:29:42: Hardware Changed to Gold Message-ID: <29431143.53.1352420983714.JavaMail.coral@shine> Per Zipping Request Kaveh has changed hardware to Gold. From emyers at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Shutdown cmp SNF 2012-11-13 09:49:08: No wafer vacuum Message-ID: <1766184.4.1352828948774.JavaMail.coral@shine> The wafer chuck vacuum does not seem to work. From zzp at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Comment cmp SNF 2012-11-13 13:09:51: testing fine without chuck vacuum Message-ID: <10377406.18.1352840991497.JavaMail.coral@shine> Ed and Jim spent two hours investigating the problem. Ed suggested me to run a test without the chuck vacuum. I ran four wafers with 35s polishing each and they went through. From eldwin at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Comment cmp SNF 2012-11-14 14:52:44: clean non-metal hardware Message-ID: <18730695.61.1352933564340.JavaMail.coral@shine> installed by gary yama. vacuum works fine From cbaxter at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Shutdown cmp SNF 2012-11-13 09:49:08: No wafer vacuum Message-ID: <17362235.89.1353030178494.JavaMail.coral@shine> There is 21" of vacuum draw, i a wafer on the chuck w/out problem. From derickson at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: derickson at snf.stanford.edu (derickson at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Comment cmp SNF 2012-12-10 13:59:52: Run Status Message-ID: <907175.3.1355176792890.JavaMail.coral@shine> Ran with Grandis only hardware and converted back to clean, non- metal status. From mmrincon at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Problem cmp SNF 2012-11-05 21:39:37: squeaking noise when heads are oscillating Message-ID: <15748526.3.1355269443308.JavaMail.coral@shine> due to incomplete pad conditioning From mmrincon at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: mmrincon at snf.stanford.edu (mmrincon at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Problem cmp SNF 2012-11-01 16:12:52: changed gold membrane, check Message-ID: <19815572.4.1355269500860.JavaMail.coral@shine> logged From shott at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Shutdown cmp SNF 2012-12-11 17:37:13: Shutdown due to interlock communication problems ... Message-ID: <14011068.0.1355276234285.JavaMail.coral@shine> SNF CMP users: I am sorry to report that I need to shutdown this tool due to network communication issues with the new "Badger style" interlocks. We had it working for a few days ... but were making what we thought were minor corrections to add interlocking for another tool in that room and seem to have lost our ability to communicate with this interlock. We are working with networking folks to see if we have a communication speed problem. We hope that this issue will be resolved quickly. Again, my sincere apologies, John From shott at snf.stanford.edu Sun Dec 23 08:47:07 2012 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:47:07 -0000 Subject: Shutdown cmp SNF 2012-12-11 17:37:13: Shutdown due to interlock communication problems ... Message-ID: <24337190.1.1355276343479.JavaMail.coral@shine> After a reboot of the servers and a careful check of outstanding network connections, I've been able to enable and disable this tool successfully, so I am now clearing this shutdown. We will hope to not disturb that network setting further. John