Shutdown cmp SNF 2012-11-01 11:42:40: Bladder torn

derickson at snf.stanford.edu derickson at snf.stanford.edu
Sun Dec 23 08:47:07 PST 2012


During conditioning of pad, with head 2 and head 1 down we noticed a very light "squeaking" noise.  Stopped the tool and ran a dummy wafer to make sure everything is OK.
During dummy run wafer was dropped and bladder was torn.  
Unkown if noise was because of bladder failing or if head is making noise.
Thanks,
Dustin



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