Shutdown cmp SNF 2012-11-13 09:49:08: No wafer vacuum
emyers at snf.stanford.edu
emyers at snf.stanford.edu
Sun Dec 23 08:47:07 PST 2012
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Comment cmp SNF 2012-11-08 16:29:42: Hardware Changed to Gold
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Shutdown cmp SNF 2012-11-13 09:49:08: No wafer vacuum
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The wafer chuck vacuum does not seem to work.
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Comment cmp SNF 2012-11-08 16:29:42: Hardware Changed to Gold
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Shutdown cmp SNF 2012-11-13 09:49:08: No wafer vacuum
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