Comment cmp SNF 2012-11-13 13:09:51: testing fine without chuck vacuum

zzp at snf.stanford.edu zzp at snf.stanford.edu
Sun Dec 23 08:47:07 PST 2012


Ed and Jim spent two hours investigating the problem. Ed suggested me to run a test without the chuck vacuum. I ran four wafers with 35s polishing each and they went through. 



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