Problem cmp SNF 2012-02-22 13:37:27: DI water line drips intermittently

horvath at snf.stanford.edu horvath at snf.stanford.edu
Wed Feb 22 13:37:28 PST 2012


The DI water line drips when the water is supposed to be OFF.  This is a problem since it dilutes the slurry during polishing. 




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