From emyers at snf.stanford.edu Mon Jun 4 14:36:56 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 4 Jun 2012 14:36:56 -0700 Subject: Comment cmp SNF 2012-02-22 13:30:54: Au cont hardware installed Message-ID: Archived From emyers at snf.stanford.edu Mon Jun 4 14:37:08 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 4 Jun 2012 14:37:08 -0700 Subject: Comment cmp SNF 2012-02-22 13:34:51: residue in slurry line Message-ID: Archived From emyers at snf.stanford.edu Mon Jun 4 14:37:16 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 4 Jun 2012 14:37:16 -0700 Subject: Problem cmp SNF 2012-02-22 13:37:27: DI water line drips intermittently Message-ID: Archived From emyers at snf.stanford.edu Mon Jun 4 14:37:49 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 4 Jun 2012 14:37:49 -0700 Subject: Problem cmp SNF 2012-03-01 17:24:23: Au polish head delamination... Message-ID: All heads were remanufactured to the current GnP design From emyers at snf.stanford.edu Mon Jun 4 14:37:59 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 4 Jun 2012 14:37:59 -0700 Subject: Comment cmp SNF 2012-03-01 17:24:39: clean non-metal h/w installed Message-ID: Archived From emyers at snf.stanford.edu Mon Jun 4 14:38:49 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 4 Jun 2012 14:38:49 -0700 Subject: Problem cmp SNF 2012-03-03 14:58:56: head 1 pressure bad, or gapping bad Message-ID: Sounds like a head gapping problem. From emyers at snf.stanford.edu Mon Jun 4 14:45:23 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 4 Jun 2012 14:45:23 -0700 Subject: Comment cmp SNF 2012-03-16 10:39:30: tool change to non-metal by Kaveh Message-ID: Archived From emyers at snf.stanford.edu Mon Jun 4 14:45:37 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 4 Jun 2012 14:45:37 -0700 Subject: Problem cmp SNF 2012-03-16 10:40:07: no Power ! Message-ID: Archived From emyers at snf.stanford.edu Mon Jun 4 14:45:48 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 4 Jun 2012 14:45:48 -0700 Subject: Comment cmp SNF 2012-03-19 08:19:04: Au cont hardware Message-ID: Archived From emyers at snf.stanford.edu Mon Jun 4 14:46:03 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 4 Jun 2012 14:46:03 -0700 Subject: Comment cmp SNF 2012-03-19 15:19:30: clean non-metal, new pad and membrane Message-ID: Archived From emyers at snf.stanford.edu Mon Jun 4 14:46:09 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 4 Jun 2012 14:46:09 -0700 Subject: Comment cmp SNF 2012-03-20 09:59:33: Au cont hardware Message-ID: Archived From emyers at snf.stanford.edu Mon Jun 4 14:46:14 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 4 Jun 2012 14:46:14 -0700 Subject: Comment cmp SNF 2012-03-21 16:27:06: Dirty Metal head1 broken Message-ID: Archived From emyers at snf.stanford.edu Mon Jun 4 14:46:19 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 4 Jun 2012 14:46:19 -0700 Subject: Comment cmp SNF 2012-03-21 16:27:41: Clean non-metal hardware installed Message-ID: Archived From emyers at snf.stanford.edu Mon Jun 4 14:46:50 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 4 Jun 2012 14:46:50 -0700 Subject: Problem cmp SNF 2012-03-21 19:33:41: nonmetal membrane failure Message-ID: All polishing head were remanufactured for the new GnP design From emyers at snf.stanford.edu Mon Jun 4 14:47:54 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 4 Jun 2012 14:47:54 -0700 Subject: Problem cmp SNF 2012-04-14 23:40:03: DI line leaks Message-ID: Archived. Most likely need to toggle the DI water valve, but the DI line input valve should be closed when not in use. From emyers at snf.stanford.edu Mon Jun 4 14:48:36 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 4 Jun 2012 14:48:36 -0700 Subject: Shutdown cmp SNF 2012-04-18 09:21:31: Nitrogen pressure problems Message-ID: Jim Haydon replaced the supply pressure regulator and the control regulator. From emyers at snf.stanford.edu Mon Jun 4 14:48:51 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 4 Jun 2012 14:48:51 -0700 Subject: Comment cmp SNF 2012-04-18 09:22:53: Sending out polishing heads Message-ID: All polishing head were remanufactured for the new GnP design From emyers at snf.stanford.edu Mon Jun 4 14:49:11 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 4 Jun 2012 14:49:11 -0700 Subject: Comment cmp SNF 2012-06-04 14:49:10: Gold Hardware Installed Message-ID: From emyers at snf.stanford.edu Mon Jun 4 14:50:41 2012 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 4 Jun 2012 14:50:41 -0700 Subject: Comment cmp SNF 2012-06-04 14:50:40: New Polishing Heads Message-ID: All polishing head were remanufactured and returned with the new GnP design. Be careful when inflating the bladder during chucking. It seems that it is much more stretchable than the previous design. From gyama at snf.stanford.edu Fri Jun 8 15:59:44 2012 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 8 Jun 2012 15:59:44 -0700 Subject: Problem cmp SNF 2012-06-08 15:59:44: previous user did Message-ID: 1) not wipe off membrane, dried slurry on black rubber, need to rinse & wipe dry 2) pressure regulator is now mounted on the back of the tool. Lower regulator not functional. Need to look through the left side window to see pressure now 3) 30/50RPM. 200/300pressure, gold tooling, new retainer ring / membrane assembly, S-10 slurry, 60s polish took off >800A thermal ox 4) new retainer ring ~0.5-1.0mm thicker than 550um wafer. It should be 66-100% of wafer thickness to allow polishing out to the edge of the wafer. Does vendor have different thickness of retainer ring, or can this one be sent out to the machine shop for thinning? From gyama at snf.stanford.edu Sun Jun 10 13:58:12 2012 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Sun, 10 Jun 2012 13:58:12 -0700 Subject: Comment cmp SNF 2012-06-10 13:58:12: switching to clean non-metal MON Message-ID: From gyama at snf.stanford.edu Mon Jun 11 08:00:46 2012 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 11 Jun 2012 08:00:46 -0700 Subject: Comment cmp SNF 2012-06-11 08:00:45: leaving gold on, sorry, forgot the wafers Message-ID: went through thermcopoly2 From faridz at snf.stanford.edu Mon Jun 18 15:03:55 2012 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Mon, 18 Jun 2012 15:03:55 -0700 Subject: Comment cmp SNF 2012-06-18 15:03:55: last container of ultra sol 2ex in stock Message-ID: From grahamab at snf.stanford.edu Thu Jun 21 09:35:06 2012 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Thu, 21 Jun 2012 09:35:06 -0700 Subject: Problem cmp SNF 2012-06-21 09:35:05: pump and water were on when I arrived Message-ID: previous user left pump on as well as the water line. there must be a small leak as there was a pool of water under the right side of the tool that I spent the first 15min of my reservation cleaning up. can see where water is dripping from on the inside of the cabinet on the right side. From grahamab at snf.stanford.edu Thu Jun 21 10:32:23 2012 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Thu, 21 Jun 2012 10:32:23 -0700 Subject: Comment cmp SNF 2012-06-21 10:32:22: clean non-metal hardware installed Message-ID: clean non-metal hardware set is on the tool. both heads and platen are non-metal. From kavehm at snf.stanford.edu Mon Jun 25 11:16:44 2012 From: kavehm at snf.stanford.edu (kavehm at snf.stanford.edu) Date: Mon, 25 Jun 2012 11:16:44 -0700 Subject: Comment cmp SNF 2012-06-25 11:16:43: gold contaminated hardware installed Message-ID: