From ryhuang at snf.stanford.edu Thu Mar 1 17:24:24 2012 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Thu, 1 Mar 2012 17:24:24 -0800 Subject: Problem cmp SNF 2012-03-01 17:24:23: Au polish head delamination... Message-ID: Au polish head currently unavailable. During tool clean-up, plastic retainer ring fell off. Polish head and retainer ring are in plastic bags on metal table next to tool. -Robert From ryhuang at snf.stanford.edu Thu Mar 1 17:24:39 2012 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Thu, 1 Mar 2012 17:24:39 -0800 Subject: Comment cmp SNF 2012-03-01 17:24:39: clean non-metal h/w installed Message-ID: From cmcg at snf.stanford.edu Sat Mar 3 14:58:56 2012 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Sat, 3 Mar 2012 14:58:56 -0800 Subject: Problem cmp SNF 2012-03-03 14:58:56: head 1 pressure bad, or gapping bad Message-ID: After conditioning the tool as usual, I noticed the bladder on the wafer chuck was very weak, and did not inflate for deflate very well. I removed the head and attempted to remount it. This seemed to improve the suction slightly. After chucking a wafer and lowering down the head to begin polishing, the machine made a loud grinding noise as if it was pushing down on the polishing pad with great force. I immediately stopped the machine, and attempted to regap. I'm not sure if I did this properly, but when I tried it again there was no grinding sound. The pressure for the bladder was still very weak, and it didn't feel as if the wafer was being held very well. After polishing a test wafer with polysi on oxide for 8min, I removed the wafer and measured a polishing rate of 32A/min. Nominal polishing rate for polysi is close to 2000A/min. From shott at snf.stanford.edu Wed Mar 14 06:00:27 2012 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 14 Mar 2012 06:00:27 -0700 Subject: Shutdown cmp SNF 2012-03-14 06:00:27: Shutdown for acid waste tie in ... Message-ID: This tool is being shutdown this morning for acid waste tie in ... John From shott at snf.stanford.edu Wed Mar 14 10:17:16 2012 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 14 Mar 2012 10:17:16 -0700 Subject: Shutdown cmp SNF 2012-03-14 06:00:27: Shutdown for acid waste tie in ... Message-ID: AWN tie in complete ... John From faridz at snf.stanford.edu Fri Mar 16 10:39:30 2012 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Fri, 16 Mar 2012 10:39:30 -0700 Subject: Comment cmp SNF 2012-03-16 10:39:30: tool change to non-metal by Kaveh Message-ID: From faridz at snf.stanford.edu Fri Mar 16 10:40:07 2012 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Fri, 16 Mar 2012 10:40:07 -0700 Subject: Problem cmp SNF 2012-03-16 10:40:07: no Power ! Message-ID: From kavehm at snf.stanford.edu Mon Mar 19 08:19:04 2012 From: kavehm at snf.stanford.edu (kavehm at snf.stanford.edu) Date: Mon, 19 Mar 2012 08:19:04 -0700 Subject: Comment cmp SNF 2012-03-19 08:19:04: Au cont hardware Message-ID: Au cont hardware installed From cmcg at snf.stanford.edu Mon Mar 19 15:19:30 2012 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Mon, 19 Mar 2012 15:19:30 -0700 Subject: Comment cmp SNF 2012-03-19 15:19:30: clean non-metal, new pad and membrane Message-ID: The pad and membrane were replaced for the clean non-metal hardware. From kavehm at snf.stanford.edu Tue Mar 20 09:59:33 2012 From: kavehm at snf.stanford.edu (kavehm at snf.stanford.edu) Date: Tue, 20 Mar 2012 09:59:33 -0700 Subject: Comment cmp SNF 2012-03-20 09:59:33: Au cont hardware Message-ID: Gold contaminated hardware installed From joem at snf.stanford.edu Wed Mar 21 16:27:07 2012 From: joem at snf.stanford.edu (joem at snf.stanford.edu) Date: Wed, 21 Mar 2012 16:27:07 -0700 Subject: Comment cmp SNF 2012-03-21 16:27:06: Dirty Metal head1 broken Message-ID: The Dirty Metal Head 1's retainer ring fell off. It was hanging down on my third wafer. I left the hardware to the right of the tool. Joe From joem at snf.stanford.edu Wed Mar 21 16:27:41 2012 From: joem at snf.stanford.edu (joem at snf.stanford.edu) Date: Wed, 21 Mar 2012 16:27:41 -0700 Subject: Comment cmp SNF 2012-03-21 16:27:41: Clean non-metal hardware installed Message-ID: From cmcg at snf.stanford.edu Wed Mar 21 19:33:41 2012 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Wed, 21 Mar 2012 19:33:41 -0700 Subject: Problem cmp SNF 2012-03-21 19:33:41: nonmetal membrane failure Message-ID: