From gyama at snf.stanford.edu Fri Dec 7 08:03:04 2007 From: gyama at snf.stanford.edu (Gary Yama (SNF)) Date: Fri, 07 Dec 2007 08:03:04 -0800 Subject: CMP next week In-Reply-To: <000001c8387c$c3ec69d0$a9b50c80@sangbumhome> References: <000001c8387c$c3ec69d0$a9b50c80@sangbumhome> Message-ID: <47596EB8.2090800@snf.stanford.edu> Are the wafers metal contaminated? Make a reservation on Coral when you plan to use it. Ed, Do you want me to change out head, conditioner & platen? Gary SangBum Kim wrote: > Hi Gary, > > Would it be possible for me to use CMP sometime after next week > Wednesday? We are preparing some sample to meet certain deadline in > January so we hope to do CMP before the weekend. Please let me know if > you need help. > > Thanks, > > SangBum > From kimsangb at stanford.edu Fri Dec 7 10:47:05 2007 From: kimsangb at stanford.edu (SangBum Kim) Date: Fri, 7 Dec 2007 10:47:05 -0800 Subject: CMP next week In-Reply-To: <47596EB8.2090800@snf.stanford.edu> Message-ID: <001801c83901$90646bf0$a9b50c80@sangbumhome> Yes, they are metal(Au) contaminated. I am not qualified for CMP yet on coral. How can I get qualified so that I can make reservation? I am thinking about Wednesday afternoon. Thanks, SangBum -----Original Message----- From: Gary Yama (SNF) [mailto:gyama at snf.stanford.edu] Sent: Friday, December 07, 2007 8:03 AM To: SangBum Kim; Stanford - Ed Myers; cmp at snf.stanford.edu Subject: Re: CMP next week Are the wafers metal contaminated? Make a reservation on Coral when you plan to use it. Ed, Do you want me to change out head, conditioner & platen? Gary SangBum Kim wrote: > Hi Gary, > > Would it be possible for me to use CMP sometime after next week > Wednesday? We are preparing some sample to meet certain deadline in > January so we hope to do CMP before the weekend. Please let me know if > you need help. > > Thanks, > > SangBum > From kimsangb at stanford.edu Thu Dec 13 14:43:51 2007 From: kimsangb at stanford.edu (SangBum Kim) Date: Thu, 13 Dec 2007 14:43:51 -0800 Subject: CMP next week In-Reply-To: <47596EB8.2090800@snf.stanford.edu> Message-ID: <001c01c83dd9$a1d02730$a9b50c80@sangbumhome> Hi, I made a reservation from 1PM to 4PM on Friday. Can I have CMP set-up for metal (gold-contaminated) wafers by then? Thanks, SangBum -----Original Message----- From: Gary Yama (SNF) [mailto:gyama at snf.stanford.edu] Sent: Friday, December 07, 2007 8:03 AM To: SangBum Kim; Stanford - Ed Myers; cmp at snf.stanford.edu Subject: Re: CMP next week Are the wafers metal contaminated? Make a reservation on Coral when you plan to use it. Ed, Do you want me to change out head, conditioner & platen? Gary SangBum Kim wrote: > Hi Gary, > > Would it be possible for me to use CMP sometime after next week > Wednesday? We are preparing some sample to meet certain deadline in > January so we hope to do CMP before the weekend. Please let me know if > you need help. > > Thanks, > > SangBum > From gyama at snf.stanford.edu Fri Dec 14 11:58:21 2007 From: gyama at snf.stanford.edu (Gary Yama (SNF)) Date: Fri, 14 Dec 2007 11:58:21 -0800 Subject: CMP next week In-Reply-To: <001c01c83dd9$a1d02730$a9b50c80@sangbumhome> References: <001c01c83dd9$a1d02730$a9b50c80@sangbumhome> Message-ID: <4762E05D.50401@snf.stanford.edu> Switched to metal, need to press pretty firmly when chucking the wafer. Gary SangBum Kim wrote: >Hi, > > I made a reservation from 1PM to 4PM on Friday. Can I have CMP set-up for >metal (gold-contaminated) wafers by then? > >Thanks, >SangBum > >-----Original Message----- >From: Gary Yama (SNF) [mailto:gyama at snf.stanford.edu] >Sent: Friday, December 07, 2007 8:03 AM >To: SangBum Kim; Stanford - Ed Myers; cmp at snf.stanford.edu >Subject: Re: CMP next week > >Are the wafers metal contaminated? Make a reservation on Coral when you >plan to use it. > >Ed, > >Do you want me to change out head, conditioner & platen? > >Gary > >SangBum Kim wrote: > > > >>Hi Gary, >> >>Would it be possible for me to use CMP sometime after next week >>Wednesday? We are preparing some sample to meet certain deadline in >>January so we hope to do CMP before the weekend. Please let me know if >>you need help. >> >>Thanks, >> >>SangBum >> >> >> > > >