CMP next week
kimsangb at stanford.edu
Fri Dec 7 10:47:05 PST 2007
Yes, they are metal(Au) contaminated. I am not qualified for CMP yet on
coral. How can I get qualified so that I can make reservation? I am thinking
about Wednesday afternoon.
From: Gary Yama (SNF) [mailto:gyama at snf.stanford.edu]
Sent: Friday, December 07, 2007 8:03 AM
To: SangBum Kim; Stanford - Ed Myers; cmp at snf.stanford.edu
Subject: Re: CMP next week
Are the wafers metal contaminated? Make a reservation on Coral when you
plan to use it.
Do you want me to change out head, conditioner & platen?
SangBum Kim wrote:
> Hi Gary,
> Would it be possible for me to use CMP sometime after next week
> Wednesday? We are preparing some sample to meet certain deadline in
> January so we hope to do CMP before the weekend. Please let me know if
> you need help.
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