CMP next week

SangBum Kim kimsangb at
Thu Dec 13 14:43:51 PST 2007


 I made a reservation from 1PM to 4PM on Friday. Can I have CMP set-up for
metal (gold-contaminated) wafers by then?


-----Original Message-----
From: Gary Yama (SNF) [mailto:gyama at] 
Sent: Friday, December 07, 2007 8:03 AM
To: SangBum Kim; Stanford - Ed Myers; cmp at
Subject: Re: CMP next week

Are the wafers metal contaminated? Make a reservation on Coral when you 
plan to use it.


Do you want me to change out head, conditioner & platen?


SangBum Kim wrote:

> Hi Gary,
> Would it be possible for me to use CMP sometime after next week 
> Wednesday? We are preparing some sample to meet certain deadline in 
> January so we hope to do CMP before the weekend. Please let me know if 
> you need help.
> Thanks,
> SangBum

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