CMP next week
kimsangb at stanford.edu
Thu Dec 13 14:43:51 PST 2007
I made a reservation from 1PM to 4PM on Friday. Can I have CMP set-up for
metal (gold-contaminated) wafers by then?
From: Gary Yama (SNF) [mailto:gyama at snf.stanford.edu]
Sent: Friday, December 07, 2007 8:03 AM
To: SangBum Kim; Stanford - Ed Myers; cmp at snf.stanford.edu
Subject: Re: CMP next week
Are the wafers metal contaminated? Make a reservation on Coral when you
plan to use it.
Do you want me to change out head, conditioner & platen?
SangBum Kim wrote:
> Hi Gary,
> Would it be possible for me to use CMP sometime after next week
> Wednesday? We are preparing some sample to meet certain deadline in
> January so we hope to do CMP before the weekend. Please let me know if
> you need help.
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