CMP next week

Gary Yama (SNF) gyama at snf.stanford.edu
Fri Dec 14 11:58:21 PST 2007


Switched to metal, need to press pretty firmly when chucking the wafer.

Gary

SangBum Kim wrote:

>Hi,
>
> I made a reservation from 1PM to 4PM on Friday. Can I have CMP set-up for
>metal (gold-contaminated) wafers by then?
>
>Thanks,
>SangBum
>
>-----Original Message-----
>From: Gary Yama (SNF) [mailto:gyama at snf.stanford.edu] 
>Sent: Friday, December 07, 2007 8:03 AM
>To: SangBum Kim; Stanford - Ed Myers; cmp at snf.stanford.edu
>Subject: Re: CMP next week
>
>Are the wafers metal contaminated? Make a reservation on Coral when you 
>plan to use it.
>
>Ed,
>
>Do you want me to change out head, conditioner & platen?
>
>Gary
>
>SangBum Kim wrote:
>
>  
>
>>Hi Gary,
>>
>>Would it be possible for me to use CMP sometime after next week 
>>Wednesday? We are preparing some sample to meet certain deadline in 
>>January so we hope to do CMP before the weekend. Please let me know if 
>>you need help.
>>
>>Thanks,
>>
>>SangBum
>>
>>    
>>
>
>  
>



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