CMP users list

Gary Yama (SNF) gyama at snf.stanford.edu
Fri Mar 7 09:05:32 PST 2008


Hello All,

So far I have:


	
	
	going back

	material 	starting 	into
Li-Wen Chang 	Pt 	metalica - dirty metal 	metalica - dirty meal
Elizabeth Edwards 	Si & Ge 	semiclean 	semiclean
Chris McGuinness 	poly 	non-metal 	non-metal
Kenny/Bosch Group 	TEOS, non-metal LTO, epipoly 	non-metal 	epi,  non-metal
Onur Fidander 	epi Ge 	semiclean 	p5000 Ch C,semiclean
SangBum Kim 	Au, Ge, PECVD STS 	dirty metal 	dirty metal
Marlene Ferrier 	thermal ox, LTO, Al 	gryphon - semiclean 	gryphon - 
semiclean

	  	  	 

	  	  	 

	  	  	 






Please make any corrections or additons.

Thanks - Gary



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