backup non-metal head1 switched to dirty metal
Gary Yama (SNF)
gyama at snf.stanford.edu
Mon Mar 24 17:01:14 PDT 2008
It looks like there was a problem with the original dirty metal head.
Currently CMP is set for dirty metal, conditioner, platen & head1. (the
head1 that is now installed is the backup head1, non-metal, from Ed's
office, thanks for letting us in Mary)
The non-functioning original dirty metal is on top of the CMP.
Non-metal platen, conditioner & head1 w/ clean retainer ring in under
Will need to get spare retainer rings, since we have no other spares.
I am getting a quote from Eminess for a IC1000, grooved & stacked stiff
pad for topology wafers.
Thanks Sangbum for doing the swaps of the retainer rings/heads.
SangBum Kim wrote:
> The current dirty metal head1 (+retainer) was constantly making noise
> while polishing. As Gary suggested, I switched only ** the retainer **
> from back-up non-metal setup that we picked up from Ed’s office and it
> also made noise. Eventually as Gary suggested, I used the non-metal
> head1 with original retainer and it works fine (polishing rate was
> normal – 210nm/min. No noise. No chucking problem. Both (100/60 and
> 50/30rpm) x (250/350 and 200/300) worked fine without making any noise.
> Thanks for Gary’s help.
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