From roberth at quswami.com Fri Jul 2 14:04:17 2010 From: roberth at quswami.com (Robert Huang) Date: Fri, 2 Jul 2010 14:04:17 -0700 Subject: any data on STS PECVD oxide polish rate... Message-ID: <3F24868DDBDC7B46B2289E33B58C4CB11F9CA7EBAD@QUSWAMI-DSRV1.quswami.local> Hi fellow CMP users, Just wondering if anyone has characterized the STS PECVD oxide polish rate with either the 2EX or S10 slurry. If so, any information would be helpful. If the data doesn't already exist, I plan to characterize early next week and would be glad to share my results if anyone is interested. Robert -------------- next part -------------- An HTML attachment was scrubbed... URL: